3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

P

Body size Metric size 06 08 10 12 Inch size 07 09 11 13 3 4 5 6 1/8 1/4 3/8 1/2 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 1/8 1/4 3/8 1/2 01 02 03 04 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

Speed Controller: Standard Type In-line Type AS Series

8 90 0.7 250 0.94 340 1/4 115 2.3 810 2.3 810 1/4 130 2.3 810 2.3 810 3/8 124 0.2 4.6 1,670 4.6 1,670 1/4 221 0.35 4.6 1,670 4.6 1,670 3/8 214 4.6 1,670 4.6 1,670 1/2 205 7.9 2,840 7.9 2,840 1/4 242 11.9 4,270 11.9 4,270 3/8 233 11.9 4,270 11.9 4,270 1/2 224 Note) Flow rate values are measured at 0.5 Mpa and 20C.

2-Color Display

pressure can be displayed in MPa or kPa. 500 kPa 500 kPa 1.5 MPa Withstand pressure 0.1 kPa 0.001 MPa 0.1 kPa Minimum unit setting NPN or PNP open collector 1 output NPN or PNP open collector 2 outputs NPN or PNP open collector 1 output + Analog output (voltage or current) Output R1/8, NPT1/8 (M5 female threaded) 4, 6, 5/32, 1/4 One-touch fittings Piping Features 1 2-Color Display High-Precision

S Couplers

Thread size Tightening torque (Nm) NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 NPT, R3/4 28 to 30 NPT, R1 36 to 38 NPT, R1 1/4 40 to 42 NPT, R1 1/2 48 to 50 (3) If the product is screwed in with excessive torque, a large amount of sealant will seep out.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

. 4.76 6.35 9.53 12.7 4.76 6.35 9.53 12.7 Bore size 2.5 4 5 6 6.5 7.5 Bore size 3.48 4.57 6.99 9.56 3.18 4.23 6.35 8.46 BU Blue Polyurethane 3 16 " " Y Yellow 1 4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 Metric size G Green C Note) Clear Inch size Note) Polyurethane only.

Digital Flow Switch (Remote type monitor unit)

x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard condition.

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

RZQ

Caution 5 150 100 200 300 1.

ZVB40_E_

1.

VFR4000-OMH0003

Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and COM. Note 3) Station numbers are started from D side although Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and COM.

Low torque Metal seal type Rotary joint

8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits MQR8-F 12 circuits MQR12-F Specifications Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure

IDX-OM-X011

Troubleshooting . 6-1 6.2 Reset the Thermal relay and High Pressure Switch . 6-3 Chapter 7 Documents . 7-1 7.1 Specifications . 7-1 7.2 Refrigerant and GWP . 7-2 7.3 Dimensions . 7-2 7.4 Electrical circuit diagram . 7-3 7.5 Air and refrigerant circuits and functions . 7-5 Chapter 8 Option C . 8-1 8.1 Specifications . 8-1 8.2 Precautions for installation and handling . 8-1 Chapter 9 Option

AS-FPQ/AS-FPG

1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

IDX-OM-W094

-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFA60/70/80/90 Series IDX-OM-W094 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 .

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

Pressure Control Equipment

Bracket Pressure gauge to 1 2 1 8 / / 14-5-15 Vacuum regulator IRV1000/2000/3000 Able to adjust the pressure for vacuum line Bracket Pressure gauge 100 to 1.3 kPa 14-6-1 M5 to 2 0.01 to 0.7 0.05 to 0.7 1 8 3 0 / Precision regulator VEX13 Large capacity exhaust regulators Setting sensitivity: 0.2% F.S. Repeatability: 0.5% F.S. Bracket Foot Pressure gauge Silencer 14-4-2 2 F.R.L.