Series 55-PA3000/5000

5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard FLUID IN Air operated type Liquid contact body material Thread type 1 2 ADC12 (Aluminium) SCS14 (Stainless steel) T F N Rc NPTF G NPT Diaphragm material 1 PTFE Air operated type 131

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

Example) AW30-03C-2R-X2622A y t r e w q Stainless steel 316 specification Symbol Description K q Body size 30 40 IP K w Thread type Nil Rc N NPT F G + IW 02 1/4 03 3/8 04 1/2 06 3/4 + 1301 K e Port size AW AW IL1 K r Option i a Float type auto drain Nil Without option C Note 1) Float type auto drain (N.C.

P

0 q t w o OUT IN t u e y OUT IN y e r No.

CHA

Basic type (B), Axial foot type (L), Rod flange type (F) Head flange type (G), Single clevis type (C), Double clevis type (D), Center trunnion type (T), Rod trunnion type (U) Mounting Symbol Specifications -XC22 Fluororubber seals Note) Refer to page 214 for definitions of terms related to pressure.

ø 50, ø 63 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Model Selection CKZ3N North American Type Made to Order European Type CKZ3T

mounting Nil F No Cylinder port Nil TF TP Yes NPT G Proximity switch T P W Rc TURCK P&F Arm opening angle 15 30 45 60 75 90 105 120 135 None 15 30 Arm mounting position 45 R Right L Left D 60 Both sides 75 90 105 120 135 Refer to Other Clamp Cylinders on page 12 for 80.

Power Clamp Cylinder ø 40, ø 50, ø 63, ø 80 Series CKZT

Power Clamp Cylinder 40, 50, 63, 80 Series CKZT How to Order CKZT Clamp Cylinder (Without Arm) 63 TN 120 T Power clamp cylinder European type Switch type T P TURCK P&F Bore size 40 50 63 80 40 50 63 80 Arm mounting position 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 Cylinder port Nil TN G NPT CKZT Clamp Arm 40 A015 C S Mounting hole Power clamp cylinder European type Symbol Bore

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

EX180

EX180 C DN 1 Communication protocol Communication connector configuration 1 2 T branching type Straight type DN MJ For EX180-SDN For EX180-SMJ1 EX180-C1 EX180-C2 Power supply connector This is a connector to supply power. This is included when shipped. EX180 CP1 1658

FC2W-X110

Output pulse frequency: f = 1/t [Hz] FC2W520 (Graph 2) 2.0 Blue 703 Frequency: f [Hz] Flow rate command value [L/min] 0 91 16.0 16.8 LED Status When an Error is Detected Status LED status Action to be taken EEPROM error Stays lit.

High Precision Filter for Liquids FGH Series

High Precision Filter for Liquids FGH Series RoHS FGD How to Order FGE FGG FGH T 100 03 002 J FGA High precision filter for liquids Element seal FGC Symbol T Material PTFE FGF Filtration accuracy Body size FGH FGH Filtration accuracy Applicable for: Applicable body Symbol 002 004 006 013 X20 Element length L117 L246 L496 Applicable element EJ701S EJ801S, ED801S EJ901S, ED901S Symbol 100 200

Thermo-chiller

: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control mode by inverter.

Thermo-chiller/

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200/400 VAC, u Piping length: Shortest 6 When circulating uid outlet port pressure = 0.5 MPa. 7 Fluid ow rate to maintain the cooling capacity and to keep the circulating uid discharge pressure to 0.5 MPa or less.

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

5) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200 VAC, u Piping length: Shortest Note 6) When circulating uid outlet port pressure return port pressure = 0.25 MPa.

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

PA3000/5000

Rc NPTF G NPT F N T, F, N are options.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

Electric Gripper 2-Finger Type LEHZ10, 16, 20, 25, 32, 40 Series LEHZ ® Step Motor (Servo/24 VDC)

Electric Gripper 2-Finger Type Step Motor (Servo/24 VDC) LEHZ10, 16, 20, 25, 32, 40 Series LEHZ RoHS How to Order 10 2 K 4 1 1 S 6N LEHZ q w e r t y u i o !0 !1 !