IDX-OM-W032

(1 ) 2. 3. 0 IDFA Series 9-3 (ADH4000-04) 9 2 IDX-OM-W032 10 R 10 R 10-1 10-2 IDFA22E/37E/55E-23-R 10A 30mA IDFA75E-23-R 20A 30mA 10-3 (IDFA55E,75E) (IDFA55E,75E) M5 9.5mm 2 1.25mm L ,N N L () () IDFA Series 10-3 10-1 IDX-OM-W032 10 R 10-4 () () ONOFF 10-5 R 6-4 6-3 T 11-6 11-3 IDFA Series 10-4 10-2 IDX-OM-W032 11 T 11 T T 11-211-3 11-1 1. 2. 3.

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

Compact Cylinder High Magnetic Field Design CDQ2BP Series

"ALrto switch detail: see pgs. 10-11.

CDQ2BP series

"ALrto switch detail: see pgs. 10-11.

CRB2-OM00001

(2) C is integration constant.

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) Retaining Ring Installation/Removal Caution 1. For installation and removal, use an appropriate pair of pliers (tool for installing a C retaining ring). 2.

NCA1

JM-10 JM-800 JM-1000 C 1.299 1.732 2.165 F 1 1/8 1 1/2 1 7/8 H 27/64 35/64 23/32 Dimensions per ASME B18.2.2 1987 (1999) Note: Jam nut is included. 13 Series NCA1 Cylinder Large Bore Series NCA1 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

q"s

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

LEKF-OMZ0035

Cable type Cable length[m] Grease application (Seal band part) Nil Without cable Nil Without cable Nil With 3 3 S Standard cable N Without (Roller specification) 5 5 R Robotic cable A 10 (Flexible cable) C 20 Driver type I/O cable length Compatible Power supply Nil Without cable drivers voltage [V] H Without cable Connector only Nil Without driver 1 1.5 [m] M2 LECYM2-V 200 to 230 U2 LECYU2

VP3145/3165/3185

In the case of -X80, VF3240(Pilot valve) will be mounted. 4-10-10

Clean Rodless Cylinder Series CYP

Cleaned, assembled, inspected and double packaged in a clean room 10 Particle concentration (particles/m) Class M3.5 [Class 100] 10 10 Long strokes Class M2.5 [Class 10] 10 Long strokes are made possible by a special cylinder tube that does not bend.

PSxx-OMV0008CN

No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

Return Filter FH100 Series

D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

M L Bearing type Compact type Slide Bearing Ball bushing bearing Bore size/Stroke (mm) Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bore size 6 10 Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)

IDX-OM-W035

S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm 2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 IDFB Series 11-4 11-2 IDX-OM-W035 11 T IDFB55E/75E =M4X10 3 2 1 0.25inch (6.5mm) 0.4inch (

LFE-OMZ0012

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Free-Mounting Cylinder with Air Cushion Series CU

K J E Size variations Standard strokes Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting type auto switch C(D)U25 C(D)U32 Features 2 Free-Mounting Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A F9BW With auto switch CDU Without auto switch Number of auto switches With auto switch (built-in magnet) 2 pcs. Nil S 1 pc.

Series 11-MXJ Air Slide Table

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).