Thermo-chiller

Model HRS018-A-20--R HRS030-A-20--R Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.39 Control method PID control Ambient temperature/Humidity/Altitude1 [C] Temperature: 5 to 45C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution4 Set temperature range1 [C] 5 to 40 Cooling capacity3

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

HRW002-H HRW002-HS HRW008-H HRW008-HS HRW015-H HRW015-HS HRW030-H HRW030-HS Model Water-cooled Cooling method Ambient temperature/humidity Note 1) Temperature: 50 to 95F (10 to 35C), Humidity: 30 to 70%RH FluorinertFC-40/GALDEN HT200 Circulating fluid Note 2) Temperature range setting Note 1) 68 to 194F (20 to 90C) Cooling capacity (50/60 Hz common) (kW) 2 8 15 29 Circulating fluid system

Mechanically Jointed Rodless Cylinder Basic Type ø 25, ø 32, ø 40 MY1B Series

:With low load shock absorber + Adjustment bolt With short spacer With long spacer H:With high load shock absorber + Adjustment bolt With short spacer With long spacer Port Port Spacers are used to fix the stroke adjustment unit an intermediate stroke position Shock Absorber Specifications Shock Absorber Model for L and H Units RB1412 19.6 12 1500 45 6.86 15.98 5 to 60 RB1007 5.9 7 1500 70

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e No pressure gauge 0 6 10 20 40 60 Q w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN e 4P 4PN 4000 psig/bar 3) 4 4B NPT 1/4 inch

2-Layer Soft Fluoropolymer Tubing Series TQ

acid Sulfuric acid Nitric acid Caustic soda Caustic potash Ammonlum hydroxide Hydrogen peroxide Water Phenol Benzene Toluene Xylene Carbon tetrachlorlde Acetone Methyl ethyl ketone Citric acid Stearic acid Formic acid Ethyl acetate Butyl acetate Methyl alcohol Ethyl alcohol Butyl alcohol Isopropyl alcohol Cellosolve Hexane Cyclohexane 58 (0.4) 145 (1.0) 131 (0.9) 87 (0.6) 87 (0.6) 158 (70

Series TRTU Flame Resistant (Equivalent to UL-94 Standard V-0) FR Three-layer Polyurethane Tubing

Min. bending radius (mm) Note 2) 50 60 70 80 2R 20 to +60C Water: 0 to 40C (No freezing) Ambient and fluid temperature Fixed end Inner tube Polyurethane Middle layer Material Aluminum laminated film Outer layer Polyolefin (Equivalent to UL-94 standard V-0) Note 1) Applicable for general industrial water. Please consult with SMC if using for the other kind of fluid.

Water Regulator

Thread type Port size Nil Rc N NPT 01 1/8 02 1/4 Related Equipment Check Valve INA-14-290/XTO-674Water Strainer Series WF300 Body material: Bronze Mesh: 100/70/50/25 mesh 14-E628 Body material: Brass Best Pneumatics Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 WR110--X224/WR110--X215 14-E627

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70

In-line Air Filter ZFC Series

Metric size 2 3.2 3.2 4 4 6 6 8 10 12 Inch size 1/8" 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" 3/8" 0.8 Fluid Air, Nitrogen 0.6 Operating pressure 100 kPa to 1.0 MPa (at 20C) Flow rate (Positive pressure) [L/min] *1 15 45 50 80 100 200 250 450 550 650 0.4 Flow rate (Vacuum pressure) [L/min] 2 5 7 10 10 20 30 70 80 100 0.2 Proof pressure [MPa] 1.5 (at 20C) Operating and ambient temperature range

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads FILTER/REGULATOR, MODULAR F.R.L.. FILTER/REGULATOR. 0.36000 lb. N01.

A tube rod with a large bore which is 70% the piston diameter is used to withstand lateral load.

The seven sizes are 10, 20, 30, 50, 70, 100, and 200 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility.

The seven sizes are 10, 20, 30, 50, 70, 100, and 200 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads FILTER REGULATOR, MODULAR. FILTER/REGULATOR. 0.69000 lb. FVD.

The seven sizes are 10, 20, 30, 50, 70, 100, and 200 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads FILTER REGULATOR, MODULAR. FILTER/REGULATOR. 0.34000 lb. FVD.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads FILTER REGULATOR, MODULAR. FILTER/REGULATOR. 0.18000 lb. FVD.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads FILTER/REGULATOR, MODULAR F.R.L.. FILTER/REGULATOR. 0.36000 lb. N01.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, F/R COMBO, PANEL MT *LQA, AIRLINE EQUIPMENT, AW FILTER/REGULATOR, DB, AW 1/4INCH STANDARD