ZMA

Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm) Maximum suction flow rate (l/min (ANR)) 18 24 36 40 20 26 36 38 45 Air consumption (l/min (ANR)) Diffuser construction Model S ZMA05H ZMA07H ZMA10H ZMA13H ZMA07M ZMA10M ZMA13M ZMA13S ZMA15S 0.5 0.7 1.0 1.3 0.7 1.0 1.3 1.3 1.5 12 23 46 95 16 32 70 75

Electro-Pneumatic Proportional Valve

(PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75

IIIIIIIIII

Two EPDM 75 durometer O-rings are supplied with each unit. Two O-rings are recommended in case of surface imperfections, damage to an O-ring during assembly, etc. The O-rings must be lubricated with silicone grease during assembly. This not only eases the assembly procedure, it also enhances the sealing characteristics of the O-ring, especially in vacuum applications.

T/TIA

Max. operating pressure Note 1) 2R (MPa) One-touch fittings, Insert fittings, Self-align fittings, Miniature fittings Applicable fittings Note 1) Note 2) Min. bending radius 100 15 25 30 50 65 13 20 24 30 40 50 60 Min. bending radius (mm) Note 3) Fixed end Bending value (Reference) 75 12 20 23 40 48 10 15 18 23 30 40 45 40 to +100C, Water: 0 to +70C (No freezing) Nylon 12 Operating temperature

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

DXT170-75-1) Unsteady adsorption 1. Do not use with thinner, carbon tetrachloride, chloroform, acetate, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid and watermiscible cutting fluid (alkaline). 2. Operate it away from direct sunlight.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

DXT170-75-1) SET2 Indicator light Caution Be sure to read before handling. Refer to front matters 58 and 59 for Safety Instructions and pages 687 to 691 for Pressure Switch Precautions. Set the possible min. pressure for adsorption confirmation. If setting the pressure lower than that, switch becomes ON in case that adsorption is not completely done.

Industrial Filter FGD Series

Symbol Nominal filtration accuracy (m) Note) Stainless steel 304/Epoxy Stainless steel 316 Polyester/PP Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 FGDT, F FGDC, E Note 1) The industrial filter described in this catalog are products in which an element is incorporated into a vessel.

Compact Direct Operated 2/3 Port Solenoid Valve for Chemicals Series LVM09/090

Air, Water, Pure water, Diluent, Cleaning solvent 75 kPa to 0.2 MPa 1.1 mm 10 ms or less (at pneumatic pressure) Zero leakage, either external or internal (at water pressure) 0.3 MPa 0 to 50C 0 to 50C (with no condensation) 18 l Free IP40 or equivalent 20 g 12, 24 VDC 10% of rated voltage Class B Operating pressure range Orifice diameter Response time Leakage Proof pressure Note 2) Ambient

Exhaust Cleaner for Vacuum Pump AMV Series

Size (Applicable vacuum pump) 100 (4B) JIS 10K FF flange Symbol Max. exhaust speed (L/min) 3 6 15 37 75 160 360 650 1,500 3,700 7,500 16,000 Specifications Oil mist removal Filtration Maximum operating temperature 99.5% or more 0.3 m (Trapping efficiency: 95%) 80C Model Model Connection R Max. air flow (L/min [ANR]) Applicable vacuum pump Max. exhaust speed (L/min) Weight (kg) Oil accumulation

Series 10-MGF ø40, ø63, ø100 Guide Table

Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 1/8 10-MGF40 10-MGF63 10-MGF100 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

3-phase 380 to 415 VAC (50/60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 20 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz5 A 16/18 8.4/9.1 Rated power consumption 50/60 Hz5 kW (kVA) 4.3/5.4 (5.5/6.0) 4.4/5.6 (5.8/6.3) Noise level (Front 1 m/Height 1 m)5 dB (A) 73 75

Thermo-chiller

, Bronze Resin PTFE, PU, FKM, EPDM, PVC, NBR, POM, PE, NR Power supply 3-phase 460 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 Sensitivity of leak current mA 30 Rated operating current5 A 14.2 Rated power consumption5 kW(kVA) 9.1 (11.4) Noise level (Front 1 m/Height 1 m)5 dB(A) 75

Series 10-MGF Guide table ø40, ø63, ø100

Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Type Rc NPT G Bore size Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 1/8 10-MGF40 10-MGF63 10-MGF100 (Both sides) Relief type Double acting 30, 50, 75

Low Differential Pressure Sensor Series PSE550 ®

of 25C) Linearity Repeatability Indication light Enclosure Operating temperature range Operating humidity range Withstand voltage Insulation resistance Environmental resistance Vibration resistance Impact resistance Temperature characteristics Port size Material of wetted parts Sensor cable With sensor cable Without sensor cable 3-wire oval cable (0.15 mm2) 2-wire oval cable (0.15 mm2) 75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

40, 50, 63, Standard stroke (mm): 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, Rc, NPT or G port threads, Clean series, AME NO SIZE RAPART, AIRLINE EQUIPMENT, AME SUPER MIST SEPARATOR, 21, AME NO SIZE RAPART, 2.40722 lb

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., CYL, COMPACT, BALL BEARING, ACTUATOR, CXSJ COMPACT CYLINDER, HB, 20MM CXSJ BALL BEARING, 1.54323 lb, ModelStandard stroke (mm) 102030405075100CXSJL200.3750.4010.4270.4530.4790.5440.609

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., CYL, COMPACT, BALL BEARING, ACTUATOR, CXSJ COMPACT CYLINDER, LB, 32MM CXSJ BALL BEARING, 4.02343 lb, ModelStandard stroke (mm) 102030405075100CXSJL321.0321.0881.1441.2001.2561.3961.536

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., CYL, COMPACT, BALL BEARING, ACTUATOR, CXSJ COMPACT CYLINDER, CB, YMM CXSJ BALL BEARING, .35273 lb, ModelStandard stroke (mm) 102030405075100CXSJL60.0480.0580.0680.0780.088