Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 40, Backflow: w/o Backflow Function, Thread: F (G), Port Size: 04 (1/2), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 40, Backflow: w/o Backflow Function, Thread: F (G), Port Size: 04 (1/2), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 11 (3/8"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment), Option 2: N (for Ammonium Hydroxide)

Body Class: 2 (Class 2, Orifice ø4), Valve Type: 0 (Normally Closed), Port Size: 02 (1/4), Thread: N (NPT), Material: N (Body: PFA, Endplate: PPS, Diaphragm: PTFE, Ammonium Hydroxide Compatible), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Class 2, Orifice ø4), Valve Type: 0 (Normally Closed), Port Size: 02 (1/4), Thread: R, Rc, Material: N (Body: PFA, Endplate: PPS, Diaphragm: PTFE, Ammonium Hydroxide Compatible), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 03 (Rcø3, NPT1/8), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread)

Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 04, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: N (w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 04, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: N (w/Name Plate)

Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU2 (w/3 m Cable, Top Entry), Option: N (w/Name Plate)

Body Size: 60, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 10 (1), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa