Applicable Tube OD: 03 (Ø5/32"), Free Flow Direction: B (One-touch Fitting to Male Thread), Thread: Metric Thread (M5)/Unified Thread (10-32UNF)/R(PT), Port Size: 10-32UNF

Applicable Tube OD: 07 (Ø1/4"), Free Flow Direction: A (Male Thread to One-touch Fitting), Thread: Metric Thread (M5)/Unified Thread (10-32UNF)/R(PT), Port Size: 10-32UNF

PF3A7xxH.eng

[F 5] [ FnC] Select FUNC (switching Analogue output 2/ External input) [ oUt] Analogue output PF3A706H Equivalent to M5 3 Nm10% 8 PF3A712H 9 Equivalent to M6 5.2 Nm10% : Arbitrary display mode can be added to the sub display by setting the [F10] sub display.

PF3A7xxH-L.eng

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes) before operation. Knurled part Units display (Accumulated flow) Units display (Instantaneous flow) Element Description Main display Displays the instantaneous flow value and error codes. (2 colour display) Indicates the output status of OUT.

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4")

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4"), Seal Method: without Sealant, Option: BH [for Welding Environments, Brass Parts (External), No Plating)

10% of rated voltageClass BStandardWith power- saving circuitWith power- saving circuit50 dB

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

MRQ

Symbol Specifications/Description Intermediate stroke Rod-end female thread Change of angle adjustable range Long Stroke (101 to 200 mm) MSQ X1 X2 X5 X10 Linear Motion Parts/Standard Stroke MSZ 32, 40 Standard stroke (mm) Size 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 CRQ2X MSQX Refer to page 352 for other intermediate strokes.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

Auto switches are shipped together (not assembled). 220 Series MXY Air Slide Table Long Stroke Type Specifications MXY8 8 MXY6 6 MXY12 12 M5 x 0.8 Model Bore size (mm) Port size Fluid Action Operating pressure Proof pressure Air Double acting (type) 0.2 to 0.55 MPa 0.83 MPa 10 to 60C 50 to 400 mm/S Metal stopper: 50 to 200 mm/S Rubber bumper Shock absorber (option, not available on MXY6,

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

Recommended Tightening Torque for Mounting Bracket on Body Bore size MU25 MU32 MU40 MU50 MU63 Tightening torque (Nm) Thread size 4.9 to 5.9 M5 x 0.8 8.28 to 10.12 M6 x 1 19.8 to 24.2 M8 x 1.25 39.6 to 48.4 M10 x 1.5 68.4 to 83.6 M12 x 1.75 2

RLQ

freezing) With auto switch: 10 to 60C (with no freezing) Ambient and fluid temperature CLJ2 Lubrication Stroke length tolerance Piston speed Port size (Rc, NPT, G) Non-lube CLM2 +1.0 0 mm 50 to 500 mm/s CLG1 1/8 1/4 Note) The minimum operating pressure of the cylinder is 0.1 MPa when the cylinder and lock are connected to separate ports.

Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD ASSY, 10-STA (SY), VALVE, SS5Y3 MANIFOLD SY3000, AJ, SS5Y3 BODY PT (M5), .44092 lb

Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1NR (1 + N + R)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 03 (ø5/32")

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4")

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 03 (ø5/32"), Seal Method: w/o Sealant, Option: B (None)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4"), Seal Method: w/o Sealant, Option: B (None)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4"), Seal Method: w/o Sealant, Option: B (None)