07-cv3-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 199

07-cvs1-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 201

08-ca2-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 35

08-ca2kw-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Piston seal NBR Cushion valve seal NBR Cylinder tube gasket NBR Disassembly/Replacement 1. Please consult with SMC when the rod seal is to be replaced.

08-ca2w-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 15 is a non-replaceable part, so it is not included in the seal kit. 36

ITVH

Test sample ITVH ITVH 3 W or less Power consumption ITVX PVQ 3000 L/min (ANR)* Maximum flow rate VY1 * Supply pressure: 3.0 MPa, Set pressure: 1.0 MPa VBA VBAT Fluorine grease Parts in contact with fluid AP100 Rc, NPT, G Pipe thread type * Without options Approx. 630 g* Weight Digital pressure display 955 3.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVH Series

20.0

Normal Bottom Peak BATTERY 1.5V x 2 LR6 G kV MADE IN JAPAN IZD IZE POWER LIGHT 110 Do not apply a strong impact on the sensing part.

Fieldbus System

End Plate Model EX245-EA2-1 EX245-EA2-2 Bracket Yes No Weight 200 g 150 g EX245-EA24 EX245 Series Dimensions SI Unit End Plate EX245-SPN1 EX245-EA2-1 120 6.5 14 22.1 28.6 6.6 5.6 98.8 148.5 133.5 61.5 1.6 6 85 10 EX245-EA2-2 37 18 120 14 61.5 44 50 130 23 35 Digital Input Module Digital Output Module EX245-DY1 EX245-DX1 22 22 27 13.5 61 120 120 81 27 54 54 61 5 Fieldbus System: For Input/

Bag Filter

FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

AR20-B to AR60-B

AR 30 q 03 t y K r BE B Option/Semi-standard: Select one each for a to g. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Thermo-con/Rack Mount Type

Heat generation amount Q : Unknown : 0.8C (0.8 K) : 25C (298.15 K) : 25.8C (298.95 K) : 3 L/min : Water Density g: 1 x 103 kg/m3 Circulating fluid temperature difference DT (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid return temperature T2 Circulating fluid flow rate L Circulating fluid Specific heat C: 4.2 x 103 J/(kgK) Q = DT x L x g x C 60 x 1000 T2: Return temperature

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Speed Controller with Uni One-touch Fitting AS Series

A ridge shape has been created as a Uni thread for common applications for Rc, G, NPT and NPTF. Specifications Fluid Air Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Proof pressure 1.5 MPa 5 to 60C (No freezing) Ambient and fluid temperature Applicable tubing material (1) Nylon, Soft-nylon, Polyurethane The male thread for piping drastically cuts piping man-hours.

D. P. Lube ALD600/900 Series

G Mounting orientation is upward.

Speed Controller with

Pages 3, 8 Lubricant: Vaseline -X12 Grease-free + Restrictor -X21 Restrictor -X214 DIN rail mounting bracket L-bracket Clean Series 10AS Series CAT.ES20-243B AS Series Flow Rate Reproducibility Lightweight Weight: Approx. 27% lighter AS1002F-04A 4.0 g Current type AS1002F-04 5.5 g Stopper face Improved reproducibility of flow rate Stable knob position when fully closed (no flow rate) onto

EXxx-OMU0020CN

EX245-EA2-1/2 9.1. . 9-1 EX245-EA2-1 . 9-2 EX245-EA2-2 61 No.EX-OMU0020CN 9.2. . 9-1 EX245-EA2-1 (WLH) mm 28.612061.5 200 g . 9-2 EX245-EA2-2 (WLH) mm 1412061.5 200 g EX245-EA2-2 P 36, 0.80.05Nm) 62 No.EX-OMU0020CN 10. 10.1. (EX245-DX1EX245-DY1) 88 EX600-ZT1 . 10-1 (EX600-ZT1) 63 No.EX-OMU0020CN 10.2.

High Vacuum L Type Valve

A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMV0002

A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114