CL

11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-33 5-33 HRX-OM-X010 Chapter 5 System Operation 5.3.31 Maintenance screen 7 POWER ON 1 2 3 Figure 5-34 Maintenance screen 7 When MSG is READY, Start/Stop of circulating fluid automatic collection is available. Table 5-31 Maintenance screen 7 No. Item Descriptions Indicates the status of circulating fluid automatic collection. READY : Ready to collect.

OMU0023

X4F ALARM Available Unavailable ALARM signal output flag X50 OVC Available Unavailable OVC signal output flag X51 OVT Available Unavailable OVT signal output flag 33 - (ii) Internal editable status flags (Y contacts / Master outputs) In serial operation mode, these flags can be set and read.

SMC

Z ZZ (NN1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33

70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AIR SUP (Pilot air supply port) Rc 1/4 FLUID IN Rc 1/4, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (Pilot air exhaust port) Rc 1/4 75 5 120 32.5 45.5 Bottom 17-5-162 23 Process Pump Built-in Solenoid

IN20267

Ethernet MPC Status Page . 33 15.5. Login Page . 34 15.6. Contact Page . 35 15.7. MPC Configuration Page . 36 15.8. Network Page . 38 15.9. Explicit Messaging . 41 16. Installation and Handling . 42 17. Air supply . 42 17.1. 3 - IN20267 Operating environment. 42 17.2. Do not use the product in a food zone: . 42 17.3. OK to use the product in: . 42 17.4.

7

Hs B A 16 8.5 D-B54 Hs B 33 A Minimum Stroke for Auto Switch Mounting Unit: mm Same surface With 2 pcs. Auto switch model With 1 pc. Different surfaces D-P3DWA D-P4DW D-P79WSE D-P74 24.5 50 50 50 12 D-M9 D-M9W D-M9A Caution D-A9 D-B54 50 50 75 As for the precautions on the auto switches, product specifications, refer to pages 437 to 439.

39

Release point Y LB (mm) Bore size (mm) LB Y 50 63 78.4 132 Cover open 78.4 138 7 Series CKZ3N Dimensions Arm / 50 Straight-Plain 20 mm Offset-Plain 16 200.03 200.03 A M61.0 A M61.0 R45 33 530.05 6.5 32 6.5 10 19 R25 10 R25 19 18 R6 19 18 R6 19 A 90.0 120.0 150.0 A 90.0 120.0 150.0 Weight kg 0.6 0.7 0.9 Weight kg 0.7 0.8 1.0 Part no. CKZ-50A001 CKZ-50A002 CKZ-50A003 Part no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Digital Flow Switch (Integrated display type)

Cross-reference for troubleshooting 33 Error indication 35 Specification 36 Specifications 36 Characteristics data 38 Dimensions 39 Made to Order 45 -1No.PF-OMO0012-E Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Cylinder with Turntable Series MGT

D C0.2 B0.2 A0.2 Hexagon socket head mounting screws A (mm) B (mm) C (mm) D (mm) MGTM MGTL 63 80 100 Bore size (mm) 142 180 210 58 54 62 124 156 188 27 33 39 22 28 33 M10 x 1.5 M12 x 1.75 M14 x 2.0 458 Prior to Use Auto Switches Common Specifications 1 Specific Product Precautions Refer to the Auto Switch Precautions on pages 8 to 11 before using auto switches.

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

Dedicated Controller

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

44

40 66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference dimensions after installation of

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 14 30 14 Vacuum suction port Rc1/8 (NPT1/8, G1/8) Extension end adjuster 45.5 (Extension end adjuster) 15 6 N x M5 x 0.8 thread depth 8 Note 1) Note 2) Retraction end adjuster 6 14.5 (Extension end adjuster) 31 33 70 35 1.5 30 3 60 17.5 5H9 ( ) depth 5 +0.030 0 F 7 4 x M5 x 0.8 thread depth 8 18 2 N 1 x F 51 3 x M6 x 1 thread depth 13 5H9 ( )

ZSE F/ISE

Upper limit Lower limit Compound pressure Regulating pressure range 100.0 kPa 100.0 kPa 100.0 to 100.0 kPa Positive pressure 1.000 MPa 0.100 MPa 0.100 to 1.000 MPa With auto shift function Upper limit Lower limit Regulating pressure range Compound pressure 100.0 kPa 100.0 kPa 100.0 to 100.0 kPa Positive pressure 1.000 MPa 1.000 MPa 1.000 to 1.000 MPa 16-2-33 10 Series ZSE50F/ISE50 Dimensions

SI unit for PROFIBUS DP

. : Refer to page 33 for the seal cap. -12No.EX-OMN0009-G BUS: D-sub 9-pin socket No.

ELECTRO-PNEUMATIC POSITIONER

P368010-32 7.010.0 Flameproof packing type P368010-33 10.112.0 Packing connector unit Table4 Flameproof packing type cable ground (Option) Cable Flameproof packing type connector unit 17 7.Adjustment Caution ! (1) For this positioner, span and zero point adjustment of each actuator is necessary.

Rotary Table/Vane Style Series MSU

M5 x 0.8 CRA1 Deflection accuracy 0.03 mm or less 1 Single vane 90 can be adjusted to 90 10 (both ends of rotation 5 each) Single vane 180 can be adjusted to 180 10 (both ends of rotation 5 each) 2 Correspondence to equivalent conventional free-mount types CRQ2 Rotary table MSUA 1 MSUA 3 MSUA 7 MSUA20 Free-mount rotary actuator CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 Note) Refer to page 33

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note