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position is set to the point on half of adjusted stroke.) 4-4-1 Direct teaching setting Move slider manually during setting. 4-4-2 JOG teaching setting Move slider by push of or of controller during setting. 4-5 After the intermediate position is fixed, push over 1s to return the actuator to normal operation. 5.Trial operation Push , and to check the operation adjusted in the above processes. 17

Appropriate tightening torque VQ4000 : 0.8 to 1.2Nm VQ5000 : 1.0 to 1.8Nm 17 VQ4000V-OMV0001 Revision history 1st Printing :Wo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All

. -17- Revision history SZ Revised to the new format. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Recommended tightening torque Wrench size [mm] Tightening Torque[N-m] Handle Hexagon panel nut Panel 17 3 to 4 4) Handle mounting Mount the handle back onto the regulator. * Excessive tightening of the handle may cause excessive pressure on the outlet side when supplying pressure. * Recommended panel dimension Panel hole diameter [mm] Panel thickness [mm] Regulator 12.5 4 or less -11- Downstream

AS4002F 4 17 Piping (2) Maintenance space Allow sufficient space for maintenance and Caution inspection. (3) Confirm that the lock nut is tight. (1) Refer to the Fittings and Tubing Precautions If the lock nut is not tight, changes in the actuator speed may occur. for handling One-touch fittings. (4) Check the number of opening and closing rotations of the needle valve.

Recommended tightening torque Wrench size [mm] Tightening Torque[N-m] Handle Hexagon panel nut Panel 17 3 to 4 4) Handle mounting Mount the handle back onto the regulator. * Excessive tightening of the handle may cause excessive pressure on the outlet side when supplying pressure. * Recommended panel dimension Panel hole diameter [mm] Panel thickness [mm] Regulator 12.5 4 or less -11- Downstream

Magnet (option) External seal (maintenance part) Heater (option) Pilot port (Pressurized / Totally closed) Axial seal (material : FKM) Scraper (Material : FKM) Valve (material : SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

15 8 7 0 0 L L L L SOLV L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping For EX260-SEN1/-SEN2 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17

32D1-X6400 80 N MHM-32D2-X6400 50 N MHM-32D3-X6400 30 N Residual holding force 0.3 N or less Lubrication Non-lube Weight 475 g Symbol 1 Magnet Gripper MHM-X6400 Dimensions 4 x 29 Auto switch insert area 4 x M5 x 0.8 Thread depth 7.5 Auto switch mounting groove on workpiece release side 4 x M5 x 0.8 Thread depth 7.5 4 x M5 x 0.8 Thread depth 7.5 Rc1/8 4 x 29 Auto switch insert area 15 15 15 17

Aluminum alloy Stainless steel plate MHK Adaptor body 2 Hard anodized Aluminum alloy Hexagon socket head bolt 13 Stainless steel Guide holder 3 Stainless steel MHS Bearing Cam 4 14 High carbon chrome bearing steel Nitriding Cold rolled steel Cylindrical roller Finger assembly 5 15 Stainless steel Heat treated Stainless steel MHC Magnet Guide 6 16 Heat treated Stainless steel Magnet holder 17

D8-M12 x 1.75 mounting thread Thread depth 17 (Both sides) 204-M10 x 1.5 thread depth 18 Mounting thread Open 23 Closed 2 Finger closing port Rc 1/4 Finger opening port Rc 1/4 4-M12 x 1.75 thread depth 10 Mounting thread 4-M12 x 1.75 bottom hole dia. 10.4 Thread for mounting attachment 12-9-5 6 Series MHT2 Construction Component Parts No.

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Tightening of M5 Thread Use of Tube with Hose Nipple Caution Caution 1. Tighten by hand, and give it an additional rotation with a wrench. Please check the number of tightening revolutions using the table below.

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

(Series MA3 only) (Series MA3 only) Rotary actuated type MHR2-10 15 Refer to AHC system Series MA. 12-12-17

D8-M12 x 1.75 mounting thread Thread depth 17 (Both sides) 204-M10 x 1.5 thread depth 18 Mounting thread Open 23 Closed 2 Finger closing port Rc 1/4 Finger opening port Rc 1/4 4-M12 x 1.75 thread depth 10 Mounting thread 4-M12 x 1.75 bottom hole dia. 10.4 Thread for mounting attachment 12-9-5 6 Series MHT2 Construction Component Parts No.

4 r Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Aluminum alloy Brass Brass POM Brass Brass Brass Brass Steel wire Stainless steel Steel band NBR NBR SS Steel band POM, Stainless steel !