Vacuum Module: Ejector System Series ZX

voltage suppressor Red 5 6 V S R Diode Note) Analog output is available only on grommet type.

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry CE-compliant

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

5 8 8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on xed parts.

AS-FM

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 20 10 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 10 5 20 10 0 5 20 10 10 0 5 0 10 Number of needle rotations Number of needle rotations Number

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Series GS40 Digital Pressure Sensor

(Full span) or less Hysteresis Pressure switch with digital display and self-contained solid state sensor 3% F.S. (5 to 40C), 5% F.S. (5 to 60C) Accuracy AF 12 to 24 VDC (Ripple 10% or less) Voltage Minimum allowable pressure indicator on digital display AR Open collector 30 V, 80 mA or less Output Light turns ON when pressure drops below the set minimum.

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

(at 25C water) Temperature characteristics 5% F.S. (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for monitor unit PF2D 300/301 (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Pulse output Output Voltage output Note 5) 1 to 5 V Accuracy: 2% F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog specifications Current output Note

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

1 Made to Order Nil 1 3 5 Without cable 1.5 Nil D Screw mounting DIN rail mounting1 Nil X5 Standard product With magnet/switch rail 3 1 Only available for the controller types 6N and 6P 2 DIN rail is not included. Order it separately. 5 When Without controller is selected for controller types, I/O cable length cannot be selected.

Thermo-chiller

Model HRS200-Am-46-mS Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.65 Control method PID control Ambient temperature/Altitude1, 7 C Temperature: 5 to 45, Altitude: less than 3000 m Circulating uid1, 2 Tap water, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity3, 7 kW 20.5 Heating capacity4 kW

LFE

/min 612 V V gal/min 712 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V 1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. 2 Options 4, 5, 6, and 7 cannot be selected when the output specication is J or K.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil 1 2 3 4 None With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator LVD Body class 2 3 4 5 6 Orifice dia. 4 8 10 16 22 Symbol 2 3 4 5 6 Valve type LQ2 integral fitting LVQ N.C. N.O.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

LVN Material Body Diaphragm Note Actuator section End plate Symbol TL/TIL Applicable tubing size PFA PPS PTFE Nil Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Contact: 1a) 8 06 3/4 Note) Terminal box for 24 VDC is available for 5, 6 (LED light).

MXJ_New

Wiring (Output) Load voltage Auto switch model Lead wire length [m]2 Pre-wired connector Applicable load Electrical entry direction 0.5 (Nil) 1 (M) 3 (L) 5 (Z) DC AC Perpendicular In-line Indicator light Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V 12 V Solid state auto switch 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire

MRHQ

Rotary Gripper Series MRHQ How to Order Lead wire length 0.5 m 3 m 5 m Nil L Z MRH 10 90 M9NV Q S M9N D Number of auto switches Rotary gripper Type of auto switch for detecting rotation Nil Without auto switch(Built-in magnet) 2 pcs. 1 pc.

Wide Type Parallel Style Air Gripper ø 10, ø 16, ø 20, ø 25 MHL2 Series

Load voltage Auto switch model Lead wire length [m]1 Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

Toggle Type Air Gripper ø 32, ø 40, ø 50, ø 63 Series MHT2

2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5V, 12 V 12 V 5V, 12 V 12 V 5 V, 12 V 12 V IC circuit Solid state switch Reed switch IC circuit Relay, PLC Diagnosis (2-color indication) 24 V Grommet Yes IC circuit Water resistant (2-color indication) M9PAV M9BAV A96 A93 A90 A96V A93V A90V IC circuit IC circuit 5 V 12 V Yes Grommet 100 V 3-wire (NPN equivalent) Relay, PLC 2-wire 24 V No 5 V

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

fitting 1/4" One-touch fitting 5/16" One-touch fitting Possible to replace only the one-touch fitting.