5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off. 1.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Suction cups with flange

ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13

Activated Carbon Filter

Bowl assembly specifications 1) AMK20 bowl assembly Semi-standard symbol 6 C 6C Semi-standard symbol: "-" Standard Port thread Semi-standard symbol: "C" Port thread Part No. type Part No. type Rc C2SK-C-D G Rc C2SF-D-X401 G NPT C2SK-C(Z)-D NPT C2SF(-Z)-D-X401 Appearance and part No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42 70 (122) L (62) A (Table traveling distance)2 10 62 55 64 [(66)]4 (66) [64]4 Stroke 70 [Origin]4 2 [(4)]4 (4) [2]4 Origin3

Ionizer

(c)When a sensor is not connected.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counterbore depth TC Inner cover holding screw Note) (mm) A 8 12 B 10.5 16 C 6.4 10.2 E 4 6 ED 9.5 13 EK 4 6 F 12.5 25 G 10 9 H 45 75 HA 23 39 HI 23 39 HL 37.6 63.3 HP 44 73.5 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 L 67 90 LD 5.6 9.2 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 N 4.5 7.5 P 5/16-24 UNF 7/16-20 UNF PA 25 50 PB 60 100 PC 10 12 Q 112 147 QW 48

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

PFxx-OMX0002

Lead wire with M12 connector (ZS-49-A) M12 female Pin number Description M12 male Pin number 1 L+ 1 2 N.C. or Other 2 3 L3 4 C/Q 4 -97No.PF-OMX0002-B Revision history A: Contents revised in several places. [August 2022] B: Contents revised in several places.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Latching Operation Indicator light A-C ON (Set) Vacuum generation Orange B-C ON (Reset) Vacuum stop Green N.C. Operation Indicator light A-C ON (Set) Vacuum generation Orange OFF Vacuum stop If the supply valve is latching type, continuous energization is not necessary because it maintains the switching position with momentary energization for at least 10 msec.

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

MY1B/C/H/HT/CW series 10 16 20100 Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.8 MPa Min. operating pressure 0.2MPa 0.1 MPa +5 to +60 o Ambient and fluid temperature C (No freezing) Lubrication Not required (non-lube) 1000 or less +1.8 +1.8 2700 or less 0 0 Stroke length tolerance +2.8 0 +2.8 0 1001 to max stroke 2701 to max storke Cushion Rubber bumper Shock absorber Air

Title not found

P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

DM

(Option ) Multi-connector Socket side only Plug side only DMK6-23 DMK6S-23 DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 DMK6P-04 DMK12-23 DMK12S-23 DMK12P-23 12 DMK-C-12 DMK12-04 DMK12S-04 DMK12P-04 Specifications Applicable tubing materials Nylon, Soft nylon, Polyurethane Applicable tubing O.D.

IDX-OM-X004

Please put a new absorbent from the ditch of C type stop circle for the hole 10mm below. Please fill the absorbent while lightly giving happen the vibration. When filling the adsorbent, please to come to the center pipe. 6. Please put a new filter element and Panting metal sequentially. 7. please put C type stop circle for the hole in the ditch of case. 8.

Digital Pressure Switch ( compatible)

Bracket C ZS-46-E Bottom piping Self tapping screws: Nominal size 3 x 10L (2 pcs.)

VQZ100V-OMT0001

C-R () C-R 3% 8% (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() / / / / () 3 3 ( ( ( ( ) ) ) ) () 3 4 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / -10 / / / / 1V ( ) (1) ( )COM COM 2 1.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.