Guide Cylinder Series MGG

4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Compact Vacuum Ejector Series ZQ

port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Modular Style Regulator with Built-in Pressure Gauge Series ARG Regulator with Built-in Pressure Gauge Series ARG Accessory Port size Model ARG20 1/8, 1/4 ARG30 1/4, 3/8 ARG40 1/4, 3/8, 1/2 Bracket Pages 20 to 23 Set nut for changing the mounting angle of pressure gauges Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARGK ARG20K 1/8, 1/4 ARG30K 1/4, 3/8 ARG40K 1/4,

FQ1

Model symbol (In-line filters) Element size 500mm (250mm x 2) EM600-005 x 4 EM600-010 x 4 EM600-020 x 4 EM600-040 x 4 EM600-074 x 4 EM600-105 x 4 5 10 20 40 74 105 Bore size 06 10 Rc 3/4 Rc 1 65 x 125mm Housing O-ring material Note) Specity seal material in place of "" (N for NBR or V for FPM). N V NBR FPM Elements other than 1 to 4 listed above are also available.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no.: ZS-31-B) 5000 (38.6) Brown 45 2: White 1: Brown 30 White 15 Blue 4: Black 3: Blue Black M12 (Part no.: ZS-31-C) (31) 5000 Brown 45 23.5 When used as a switch output device 30 White No.

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

Unit Manifold Valve

47 (56) 4 stations 2 one-touch fitting 53 (62) Barb fitting 75 (85) 8 stations 2 one-touch fitting 84 (94) Note) ( ): values with bracket 2 Compact Direct Operated 3 Port Solenoid Valve Series VV061 Unit Manifold Internal Wiring In case of 4 stations In case of 8 stations Groove (2 locations) Groove (2 locations) 1 3 5 7 9 1 3 5 2 4 6 8 10 2 4 6 Terminal no.

MLGC

4 !5 !6 !7 !8 !

SI Unit

Pin Remarks 1 24 V (PWR(V)) 2 0 V (PWR(V)) 3 24 V (PWR) 4 0 V (PWR) M12 4-pin plug A-coded connector(PWR) Fig. 3-4 Pin allocations of Power connectors Pin (BUS IN)Port1 Port type: MDI (BUS OUT)Port2 Port type: MDI-X 1 TD+ Transmit data+ RD+ Receive data+ 2 RD+ Receive data+ TD+ Transmit data+ 3 TDTransmit dataRDReceive data4 RDReceive dataTDTransmit dataM12 4-pin socket D-coded connector

Electric Actuator / Slider Type 《 AC Servo Motor 》

Procedure before operation . 4 1.1 Preparation . 4 1.2 Startup . 6 1.3 Gain tuning . 7 1.3.1 Procedure . 7 1.3.2 The recommended the parameter for each driver . 8 2. Slider type LEFS series . 19 2.1 Specification . 19 2.2 How to Order . 20 2.3 Construction . 21 3. Slider type LEFB series . 23 3.1 Specification . 23 3.2 How to Order . 24 3.3 Construction . 25 4.

Digital Pressure Switch

cores (A.B) Sectional area of conductor: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Outside diameter of insulator: 0.95 mm Lead wire Standard CE marked (EMC directive/RoHS directive), UL/CSA Piping specifications Model No. 02 N02 F02 C01 A2 B2 Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 Mass (Bottom ported) 117 g 118 g 114 g 120 g 111 g Mass (Rear ported) 89 g 90 g 86 g 86 g 92 g 83 g Leakage

Air cylinder

Construction Figure-4 125 to 160 Table. 13 Parts list No.

VT307

, 1 4 1 8 VZ Note) For more than 6 stations, supply air both sides of P port.

Pressure Relief 3 Port Valve With Locking Holes

3.3 0.40 0.88 3.1 0.51 0.84 VHS3510 1/4 1/4 6.4 0.45 1.7 6.2 0.38 1.7 VHS30 3/8 8.3 0.41 2.3 7.0 0.41 1.9 1/4 7.3 0.49 2.0 8.5 0.35 2.3 VHS40 3/8 10.9 0.45 3.0 11.6 0.40 3.1 3/8 VHS4510 1/2 14.2 0.39 3.8 13.3 0.43 3.6 VHS40-06 VHS4510-06 3/4 1/2 18.3 0.31 5.0 17.7 0.37 4.8 VHS5510 3/4 1/2 23.8 0.41 6.4 21.8 0.41 5.9 VHS50 1 31.9 0.33 8.6 23.5 0.44 6.4 4.

Free Mount Cylinder for Vacuum Series ZCUK

SP ZCUK (mm) W B D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) AMJ B A W 16.5 A B W A 10 16 20 25 32 0.5 7.5 2.5 7.5 3 12.5 16.5 1.5 (1) AMV 0 8 1.5 8 20 4 16 20 2 (0.5) 2 10 0 10 24 6 20 24 4 (1.5) AEP 3.5 11.5 1.5 11.5 26.5 7 22.5 26.5 5.5 (3) 4.5 12.5 2.5 12.5 27.5 8 23.5 27.5 6.5 (4) HEP Note 1) Figures in the table above are used as a reference when mounting the auto switches

PF2D

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

VNC

1 2 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa B: Locking slotted type 3 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking push type 9 Other 20 (14) 3 Option 25 (16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1

3 Port Solenoid Valve

A01 A02 3.18/2 Barb fittings (6/4) Barb fittings 4/2.5 Note) The outside and inside diameters of the applicable tubing are indicated for the barb fitting.