Modular F.R.L. Unit

70 90 95 C 7 10 14 18 20 24 24 B 67 97 129 165 169 245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With

Electric Actuator/Slider Type

10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LEYG25M LEYG25M 0.1 0.1 100 1000 70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200 mm/s or less !

IDX-OM-W093

M3.5 1.25-3.5 2-3.5 ( 8.5mm ) ( 8.5mm ) IDF60/70/80/90 Series 3-5 IDX-OM-W093 M3.5 1.01.3Nm M4.0 1.42.0Nm IDF60/70/80/90 Series 3-6 IDX-OM-W093 3.3 ()2 O O IDF60/70/80/90 Series 3-7 IDX-OM-W093 IDF60/70/80/90 Series 3-8 IDX-OM-W093 / 4 / 4.1 INOUT 4.2 ON INOUT 6 0.1MPa N.O.

High Vacuum Angle Valve

M12, L = 70 Refer to part no.

IDX-OM-V022

IDF60/70/80/90 Series 9.1 Specifications 9-1 IDX-OM-V022 Chapter 9 Option C 9.2 Precautions for installation and handling IDF60/70/80/90 Series 9-2 IDX-OM-V022 Chapter 10 Option L Chapter 10 Option L Option L: Dryer with heavy duty auto drain.

ZP

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

CL

71 81 101 119 133 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44 52 64 78 92 9 9 12 12 15 18 18 42 50 59 76 92 85 95 102 113 124 15 17 17 21 21 16 20 20 25 30 80 90 105 130 150 26 27 26 30 31 32 40 40 52 52 54 59 67 72 76 60 70 86 102 116 10 13 18 23 25 10 12 15 17 19 11.5 13.5 13.5 W/o rod boot W/ rod boot (One side) (Both sides) ZZ 271 300 314 368 388 Bore (mm) 40

Combination Cylinder

86 102 116 22 27 27 32 41 30 35 35 40 40 27 32 32 37 37 Bore (mm) X W S PW PL PH PG P N MM LZ LY LX LT LS LH LD KA K J H1 40 50 63 80 100 1/4 3/8 3/8 1/2 1/2 8 0 0 0 0 27 27 34 44 43 45 50 60 70 80 153 168 182 208 226 11 10 13 15 15 20 21 23 23 25 42 46 48.5 55 56.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 70 80 93 116 133 81 90 106 131 148 42 50 59 76 92 3.2 3.2

ZP

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

Electric Actuator with Integrated Guide

to 130mm Brake power line Cable length 70 to 130mm Sensor cable Cable length 70 to 130mm Motor power line Sensor cable fixing clip (20.5) Stroke + 66 (Table movement range) 40 40 82.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A 42.5 22.5 32.5 A 19 19 Stroke

IDX-OM-V020

IDFA60/70/80/90 Series 9.1 Specifications 9-1 IDX-OM-V020 Chapter 9 Option C 9.2 Precautions for installation and handling IDFA60/70/80/90 Series 9-2 IDX-OM-V020 Chapter 10 Option L Chapter 10 Option L Option L: Dryer with heavy duty auto drain.

IDX-OM-V024

IDFB60/70/80/90 Series 11.4 Connect the power cable and signal cable 11-3 IDX-OM-V024 Chapter 11 Option T 11.5 Electric circuit IDFB60-11-T IDFB60/70-23-T IDFB80/90-23-T SYMBOL WIRE COLOR (BK) Black (WH) White (GR) Gray (SY) Sky blue (BU) Blue (BR) Brown (YE) Yellow (OR) Orange (G/Y) Green/Yellow 11.5 Electric circuit IDFB60/70/80/90 Series 11-4 IDX-OM-V024 Chapter 12 Option V Chapter 12

IDX-OM-U010

AD52-A Bowl assembly 1 KA00463 Bowl O-ring 1 AD402P-040S Element 1 IDFC60/70/80/90 Series 5.2 Regular maintenance 5-3 IDX-OM-U010 Chapter 5 Checks and Maintenance 5.2 Regular maintenance IDFC60/70/80/90 Series 5-4 IDX-OM-U010 Chapter 6 Troubleshooting Chapter 6 Troubleshooting 6.1 Troubleshooting Refer to the table below if any abnormality is found.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

32A 173.6 67.5 42 160 21 51.5 135 12 100 36 80 40A 179.3 70 42 170 21 54.5 140 14 105 42 90 50A 192.3 77.5 42 180 21 59 155 14 120 52 Specific Product Precautions Size Applicable flange Grommet Grommet with PCB Conduit DIN terminal DIN terminal without connector M12 connector T U T U T U T U V T U T U 70 32A 68.4 31.1 74.1 41 75.7 51.9 77.2 58.3 70 77.2 34.3 76 44.1 80 40A 71.6 31.1 77.3

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

IDX-OM-W095

/70/80/90 Series 7-5 IDX-OM-W095 IDFC60/70/80/90 Series 7-6 IDX-OM-W095 C 8 C 8.1 8.2 1) 2) IDFC60/70/80/90 Series 8-1 IDX-OM-W095 L 9 L L 9.1 0 () 9.2 ADH4000-04 ADH4000-04 ADH-E400 N.O.

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3