V

Suction Flow Air Consumption Nil Without E15L Solid State (NPN) E55L Solid State (PNP) M21L Reed M15L Non-contact NZM05H 5Kgf/cm2 / 75PSI 630mmHg 18 12 NZM07H 5Kgf/cm2 / 75PSI 630mmHg 24 23 NZM10H 5Kgf/cm2 / 75PSI 630mmHg 36 46 NZM13H 5Kgf/cm2 / 75PSI 630mmHg 40 95 NZM07M 3.5Kgf/cm2 / 50PSI 630mmHg 20 16 NZM10M 3.5Kgf/cm2 / 50PSI 630mmHg 26 32 NZM13M 3.5Kgf/cm2 / 50PSI 630mmHg 36 70 FOR FURTHER

VZ3000

Applicable cable O.D. 3.5 to 7 (Lead wire length) MAX. 10 : With light/surge voltage suppressor 3-3-45 Series VZ3000 Type 42 Manifold: Side Ported VV5Z3-42Station 1-01 Manual override (Non-locking) Grommet (G), (H) M5 x 0.8 (PE port) (Pitch) (Mounting hole) 4-Rc 1/4 (1(P), 3/5(R) port) G: 300 mm H: 600 mm (Lead wire length) (Pitch) 24.5 P=17 (4(A), 2(B) port) 2n-Rc 1/8 (mm) Stations 2 3 66 53 83 70

VZ5000

Platinum silver q Description Sub-plate Aluminum die-casted DXT199-7-1P DXT199-7-2P Rc 1 8 Rc 1 4 Piston plate Body u Resin r Aluminum, HNBR Black w e DXT170-CSolenoid assembly Epoxy/Stainless steel i Piston Spool valve Common with Series VZ 000 1 3 Thread type Nil: Rc F: G N: NPT T: NPTF Resin o O-ring NBR 13 x 11 x 1 Black painted t Resin End cover y Stainless steel Spool spring 3-3-70

Metal Seal/Rubber Seal Series VQ Body Ported

L dimension 40 510.5 No. 31 32 33 34 35 36 37 38 39 398 410.5 423 435.5 448 460.5 473 485.5 498 L dimension 2-4-70 VQC SQ VQ0 VQ4 VQ5 VQZ VQD 2-4-71 For details about certified products conforming to international standards, visit us at www.smcworld.com.

PC Wiring System

Circuit diagram Output Page 49 in CAT.E02-20 PCW-993217 LO Dimensions 70 2 x 5 67.4 (2) (2) 41.2 118 HI/LO setting This type is unnecessary to set jumpers (short-circuit sockets) with fixed higher/lower (HI/LO) orders of input/output units LO type: address assignment is fixed from LO 0 to 7.

KC

(mm) 4 6 8 10 12 Effective area (mm2) Nylon Urethane 5.6 4 13.1 10.4 26.1 18.0 41.5 29.5 58.3 46.1 Applicable tubing Note) Weight (g) Model d D L A M KCH04-99 KCH06-99 KCH08-99 KCH10-99 KCH12-99 5 8 11 18 24 Note) D: Max. diameter 4 6 8 10 12 9.8 11.8 14 17 19 40.6 43.1 46.7 52.6 54.9 22.6 24.1 25.2 28.6 29.4 16 17 18.5 21 22 Applicable fitting 15-2-70 Self-seal Fittings Series KC Elbow Plug

VR4151/4152

A P2 R P1 0.5 s or more R P2 No output A A 2 Series VR51 Dimensions 70 45 (18) 4.9 Supply port P1(11) Flame resistant One-touch fitting: 6, 1/4 Exhaust port (with silencer) R(4) 10 26 9 27 Supply port P2(12) Flame resistant One-touch fitting: 6, 1/4 Output port A(2) Mounting thread 11.5 22 Flame resistant One-touch fitting: 6, 1/4 2-M5 x 0.8 Thread depth 5 45 Mounting thread 2

0.4

Suction flow rate Nl/min Air consumption Nl/min Vacuum pressure (mmHg) Vacuum pressure (mmHg) Vacuum pressure (mmHg) Vacuum pressure (mmHg) Suction flow rate Suction flow rate Nl/min Supply pressure (MPa) Nozzle Diameter 1.0 Exhaust Characteristics Flow Characteristics Manifold Optional Parts Vacuum pressure Air consumption Suction flow rate Suction flow rate Nl/min Supply pressure (MPa) 70

TL/TIL

136 Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Chemical Compatibility 100% Acetic acid VC Note 1) 100% Acetone VDW 40% Ammonium fluoride VQ 30% Ammonium hydroxide VX2 100% Butyl acetate VX 100% Methylne chloride VX3 38% Hydrochloric acid VXA 50% Hydrofluoric acid 60% Hydrogen peroxide VN 100% Methanol LVC Methyl ethyl Ketone LVA 70%

2-Color Display

Elbow type 6 mm 1/4 inch Sensor pressure receiving area: Silicon Sensor pressure receiving area Wetted parts material PBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR 81 g 85 g 43 g C3602 (electroless nickel plated) O-ring: HNBR Piping port Including lead wire with connector (3 cores, 2 m) 71 g 75 g 33 g 73 g 77 g 35 g 75 g 79 g 37 g 73 g 77 g 35 g 75 g 79 g 37 g 70

EX180

156 k/625 kbps 2.5 M/5 M/10 Mbps Communication speed 125 k/250 k/500 kbps Specified file Note 2) EDS file Occupied area (Number of inputs/outputs) SDN1: 0/32 SDN2: 0/16 32/32 (1 station, remote I/O stations) Terminal resistor Built in the unit (Switch setting, 110 ) Not applicable For unit 11 to 25 VDC 15 to 30 VDC Power supply 24 VDC10%/5% For valve Internal current consumption (Unit) 70

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Shock Absorber Specifications RB1007 RB1412 RB2015 RB2725 Shock absorber model MGG20 MGG25, 32 MGG80, 100 Applicable guide cylinder MGG40,50,63 Maximum energy absorption (J) 5.88 19.6 58.8 147 Stroke absorption (mm) 7 12 15 25 DMaximum collision speed (m/s) 5 70 45 25 10 Max. operating frequency (cycle/min) -X Ambient temperature range ( C) 10 to 80 Individual -X 4.22 6.86 8.34 8.83 Spring

Thermo-chiller Series HRZ Fluorinated Fluid Type

/humidity Note 1) HRZ002-L HRZ004-L HRZ008-L HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ002-W HRZ008-W Water-cooled refrigeration R404A (HFC) PID control Temperature: 10 to 35C, Humidity: 30 to 70%RH 20 to 40C: FluorinertTM FC-3283/GALDEN HT135 20 to 90C: FluorinertTM FC-40/GALDEN HT200 FluorinertTM FC-3283/GALDEN HT135 FluorinertTM FC-40/GALDEN HT200 Circulating fluid Note 2) Temp. range setting

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

MY3M Shock Absorber Specifications RB 0806 RB 1412 RB 2015 RB 1007 Model Max. energy absorption (J) 2.9 19.6 58.8 5.9 Stroke absorption (mm) 6 12 15 7 Max. impact speed (mm/s) 1500 1500 1500 1500 80 45 25 70 Max. operating frequency (cycle/min) Extended 1.96 6.86 8.34 4.22 Spring force (N) Compressed 4.22 15.98 20.50 6.86 Operating temperature range (C) 5 to 60 The shock absorber service

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

RB 0806 RB 2015 RB 2725 RB 1412 RB 1007 Symbol Specifications Model -XB11 Long stroke type 0.84 29.8 46.6 10.1 2.4 Max. energy absorption (J) Shock absorber soft type Series RJ type -XB22 Stroke absorption (mm) 6 15 25 12 7 1000 Max. collision speed (mm/s) -X168 -X416 -X417 Helical insert thread 80 25 10 45 70 Max. operating frequency (cycle/min) Holder mounting bracket Extended 1.96 8.34

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

0.178 x 500 50 = 3.442 kg CY1L CY1H Shock Absorber Specifications CY1F CY1S6 CY1S10 CY1S15 CY1S20 CY1S25 CY1S32 CY1S40 Applicable cylinder CYP Shock absorber model RJ0604 RJ1412L RJ0806H RJ0806L RJ1007L RJ2015H RJ2015L Max. absorbed energy (J) 1 30 3 10 0.5 Stroke absorption (mm) 6 15 7 12 4 Collision speed (m/s) 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1 0.05 to 1 0.05 to 1 80 25 70

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Shock Absorber Specifications RB0805 CX2N10, CX215 RB1006 CX225 0.98 Shock absorber Applicable slide unit Maximum energy absorption (J) 3.92 Stroke absorption (mm) 6 5 Max. collision speed (m/sec) 0.05 to 5 70 80 Max. operating frequency (cycle/min) Max. allowable thrust (N) 353 147 Ambient temperature range (C) CX2 10 to 80 Extended 4.22 1.96 Spring force (N) Retracted 6.18 3.83 CXW Mass

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Symbol Specifications 6, 10 15, 20, 25, 32, 40 -X116 -X132 -X160 -X168 -X206 -X210 -X322 -X324 -X1468 Hydro specifications 1200 Axial ports 100 40 40 1100 High speed specifications 90 1000 900 Bore size 10 Bore size 10 Helical insert thread specifications Theoretical thrust (N) Theoretical thrust (N) 80 Bore size Bore size Added mounting tap positions for slider 70 800 700 32 32 Non-lubricated

Industrial Filter FGD Series

Symbol Nominal filtration accuracy (m) Note) Stainless steel 304/Epoxy Stainless steel 316 Polyester/PP Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 FGDT, F FGDC, E Note 1) The industrial filter described in this catalog are products in which an element is incorporated into a vessel.