Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Bearing 15 2 20, 30, 40 Carbon steel Aluminum alloy Parallel key Plate 16 3 Electroless nickel plated 20, 30, 40 Stainless steel Aluminum alloy End cover Steel balls 17 4 Stainless steel Stainless steel Piston C S type snap ring 18 5 Sizes: 10, 15 Stainless steel Seal 19 Shaft 6 Chromium molybdenum steel Sizes: 20, 30, 40 Gasket 20 NBR Aluminum alloy Chromated Seal retainer Piston seal 21

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

CUJ CU B Dimensions (without magnet) (mm) B Bore size Overall length: Maximum shortened approx. 64% Volume: Maximum reduced approx. 70% (compared to series CU cylinder without magnet) C A B 4 6 8 10 13 (13) 15 19 (22) 13 13 (33) C + Stroke C + Stroke 13 13.5 (15) 21 22 (24) 13 13 (36) A A 10 Dimensions inside ( ) are for series CU cylinder. 1 in 25.4mm Uses new type miniature auto switches

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5021

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

pressure MPa (psi) 0.2 to 0.6 (29 to 87) 10 to 60C (14 to 140F) Ambient and fluid temperature 0.01 (0.0004in) Repeatability mm 60 Max. operating frequency c.p.m. 120 Non-lube Lubrication Double acting Action External gripping force Internal gripping force Note 1) Effective gripping force N (lbf) at pressure of 0.5MPa (72psi) 63 (14.1) 177 (39.8) 111 (25.0) 280 (62.9) 502 (112.8) 37 (8.3) 21

Pin Clamp Cylinder Series CKQ/CLKQ

4 An enlarged drawing of the shim part With shims Parts List Description Material No. 1 Description Material No. 16 Body Cylinder tube Aluminum alloy Aluminum alloy Guide pin Piston 2 17 Stainless steel Aluminum alloy 3 Clamp arm 18 Piston rod Carbon steel Stainless steel 4 Seat 19 Collar Structural steel Aluminum alloy Pin A Type C snap ring 5 20 Carbon steel Tool steel Pin B Bushing 6 21

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Drivers for LJ1, LG1, LX Dimensions 5.2 Driver 150 168 160 5.2 20 A 105 3 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector) Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ OZ CZ CW+ CW CCW+ CCW FG Signal description Torque

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Process Pump Air Operated Type 1l/min = 0.035SCFM 1m = 3.28ft 1MPa = 145psi Performance Curves/Air Operated Type PA313 Flow rate characteristics PA513 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Port size (nominal size B) 1.5MPa 5 to 60C 99% 1/8, 1/4, 3/8 1/4, 3/8, 1/2 Ambient and fluid temperature Dehumidification rate 0.38 0.55 Weight (kg) Note) Maximum flow rate at pressure 0.7MPa 2 years, or when pressure drop reaches 0.1MPa Element life Note) With auto drain is 0.15MPa 21 Related Products Related Products (Refer to the individual product catalogs for further details.)

Stopper Cylinder Adjustable Mounting Height Type Series RSG

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.

Heavy Duty Stopper Cylinder Series RSH/RS1H

) (mm) Width across corners I 85 103 132 H 128 144.5 171.5 FX 73 90 110 FZ 93 114 138 GA 16 24 24 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21

Digital Flow Switch Series PFA For Air Series PFW For Water

temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27 Unit specification Flow rate range With unit switching function Fixed SI unit Note) Nil M 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21

Floating Joint/Stainless Steel Type Series JS

JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity

Series LX Construction and Mounting

steel Black zinc chromated Stopper nut 3 Resin Nut 14 Aluminum alloy LX Bumper bolt Coupling 4 Bearing steel 15 Nickel plated Bumper Resin Bearing 5 16 Aluminum alloy Resin Motor cover Body 17 6 Anodized Tension ring Mounting plate Mild steel Stainless steel 7 Nickel plated 18 Ball bushing Cable cap 8 19 Bearing steel Plug Guide rod Chrome plated 20 9 Magnet Aluminum alloy Tube Anodized 21

High Vacuum Angle Valve, XL Series

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

Ejector Valve Unit, Series ZYY/ZYX

A side: Orange (for supply valve) B side: Green (for release valve) Release flow adjustment needle (With light/surge voltage suppressor) 33.3 4.4 Pressure setting trimmer Pilot valve exhaust port Hysteresis setting trimmer (M3: Port PE) Silencer (AN203-KM8) 57.1 62.1 47.5 39.7 29.5 21 33.6 23.5 10 Vacuum port (5.25) (13.5) 3.75 (8.25) 6 One-touch fitting Port V Supply port 16.75 88 19 Button

Controller setting Software (ACT Controller)

Normal mode 16 5.1 Summary of Normal mode 16 5.2 Menu 19 5.3 Window of Normal mode 21 5.3.1 Status window 21 5.3.2 Teaching window 23 5.3.3 Alarm window 24 5.3.4 Step data window 25 5.3.5. Parameter window 26 5.3.6 Drive test window 27 5.4 Teaching method 28 5.4.1 Preparation 28 5.4.2.

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.