0.4

or less Rubber seal 0.18 0.42 0.65 0.16 0.20 0.70 25 or less 47 or less VQ1000 VQ1400 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.68 20 or less 40 or less Exhaust center 77 VQ1401 33 or less Rubber seal 0.25 0.30 1.0 0.16 0.20 0.70 25 or less 47 or less VQ1500 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.70 20 or less 40 or less Pressure center VQ1501 33 or less Rubber seal 0.18

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B D-A3l D-G39/K39 D-A5l/A6l D-A59W G1/2 (Applicable cable O.D.: 6.8 to 9.6) Hs Auto switch Hs Ht Ht 49 56 34 S M C AUTO SWITCH S M C AUTO SWITCH A 33 B A 36 B D-A3lC D-G39C/K39C Auto switch G1/2 (Applicable cable O.D.: 6.8 to 9.6) Auto switch D-G5l/K59 D-G5lW/K59W D-G5BA D-G59F/G5NT Hw A 49 B Hs Hs Auto switch 36 24.5 56 D-F5l/J59 D-F5NT D-F5lW/J59W D-F5BA/F59F 14 A 33 B Hs Auto switch

Electric Rotary Table

Features 6 Series LER System Construction/General Purpose I/O Provided by customer Electric rotary table PLC Power supply for I/O signal 24 VDC Note) I/O cable Pages 21, 33 Part no.

REA/REB

34 RS H A 60 + Stroke 9.5 9.5 80 + Stroke RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-33 33 Series REAS Dimensions: 15 to 40 ta tb EA ta EA Port cover FB EB FA TT T S + Stroke 2-P FA Hollow shaft for piping Counterbore dia.

High Purity Fluoropolymer

Refer to pages 33 through 36 regarding tubing connection and special tools. 2. Tighten the nut until it touches the end surface of the body, and then tighten it an addition 1/8 turn. As a guide, refer to the proper tightening torques shown below.

Table of Contents

33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35 35 21.9 30.4 15.2 20 47.5 38 38 23.8 38.3 18.5 41.9 55 59 19.4 30.4 12.8 44.4 57 61 21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension

90

Otherwise, it may cause switch output malfunction. 33 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rotary Actuator

For applicable auto switch Nil: A right-hand switch and a Refer to page 33 when the model, refer to the table below. left-hand switch are shipped. angle adjuster unit is needed separately.

Digital Flow Switch (Integrated display type)

Input of set values Setting of Setting of P1AH/n1AH P1dH/n1dH P1L/n1L P_1/n_1 P1AL/n1AL P1dL/n1dL P1H/n1H H_1 H1 (Page 33) (Page 33) (Page 35) 4. Selection of display colour SoG/SoR/REd/GRN (Page 36) 5. Completed [F 1] Setting of OUT1 is completed. -31No.PF-OMM0005-N 1.

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Digital Flow Switch (Remote type monitor unit)

Cross-reference for troubleshooting 33 Error indication 35 Specifications 36 Specifications 36 Dimensions 40 -1No.PF-OMG0008-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08 AS231FG-N02-03 28.2 45.6 40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 33 17 20.2 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 40.4 35 34.4 29.4 25.2 47 45.6 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 19 36 18.5 17.5 12.9 18.3 20.6 AS331FG

Metal Seal/Rubber Seal Series VQ Body Ported

or less 47 or less VQ1430 Metal seal 0.74 0.14 0.17 0.84 0.16 0.20 20 or less 26 or less 40 or less Exhaust center 105 VQ1431 Rubber seal 0.78 0.28 0.19 1.0 0.21 0.24 25 or less 33 or less 47 or less VQ1530 Metal seal 0.74 0.14 0.17 0.82 0.16 0.20 20 or less 26 or less 40 or less Pressure center VQ1531 Rubber seal 0.78 0.28 0.19 0.84 0.21 0.22 25 or less 33 or less 47 or less Note 1) Cylinder

MG

28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling.

CL

11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

SMC Pneumatic Clean Series

35 86 32 130 116 101 105 188 M10 x 1.25 M18 x 1.5 11.5 Head side flange style (G) / CA2G, CA2G 10112122Relief port 2-cushion valve M5 x 0.8 GA 6 4-FD 4-J GB Width across flats KA 2-RcP Width across flats B1 FV FY D B E MM H1 AL A N C 18 K N 7 B H S + Stroke FT FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ P S ZZ A GAGB H H1 K KA N 12 80 42 33

Plug-in Unit

or less 25 or less VQC1301 0.70 Rubber seal 0.65 0.20 0.16 0.42 0.18 26 or less 20 or less VQC1400 0.68 Metal seal 0.72 0.15 0.16 0.25 0.18 JIS Symbol Exhaust center 78 33 or less 25 or less VQC1401 0.70 Rubber seal 1.0 0.20 0.16 0.30 0.25 2 position single (A)( 4 B) 2 26 or less 20 or less VQC1500 0.70 Metal seal 0.72 0.15 0.16 0.25 0.18 Pressure center 33 or less 25 or less VQC1501 0.85

Compact Type

0.2 33 0.2 20 42 8 8 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2-M3 x 0.5 through 6.5 2-M4 x 0.7 through M3 x 0.5 x 10 L (Hexagon socket head cap screw) M4 x 0.7 x 14.5 L (Hexagon head bolt) M4 x 0.7 (Hexagon nut) (16) (8+ Stroke) 2-M3 x 0.5 through 4 33 0.2 6 11 Compact Type Dual-Rod Cylinder Series CXSJ Dimensions: 6, 10 Axial Piping CXSJ6P 9 + Stroke 10 0.3 12.8