Size: M3, M5 Basis, Style: Universal, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: 1/8", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/4", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø6, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/4", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 5/32", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø4, Option: Nickel Plated, Lock Nut: -
High Vacuum L Type Valve Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLFV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).
Tighten the FG terminal (M3 round head combination screw) firmly with a tightening torque of 0.3 Nm. Tighten the connector fixing screws (M2.5 slotted head screws) firmly with a tightening torque of 0.2 to 0.3 Nm. A. Dual power supplies B.
ZS-32-A Length: 2 m (With rubber cover) Note Lead wire with connector Mist separator regulator AWM20/AWM30/AWM40 For ISE35--A (AR/AW series) Mounting thread (M3 x 7L, 2 pcs.), adapter, lock pin, O-ring are attached ZS-32-C Mounting option Micro mist separator regulator AWD20/AWD30/AWD40 For ISE35--B (ARM10/11 series) Mounting thread (M3 x 13, 2 pcs.), adapter, lock pin, O-ring are attached
(When greasy fumes are 1,000 mg/m3 at the IN side, it will be 5 mg/m3 or less at the OUT side.) Exhaust ducts from a vacuum pump is not necessary.
REA REC 32, 50, 63, 80 20 RHC MTS Guide rod CC Mounting Set screw (M3) Caution qDo not apply rotational torque to the cylinder rod. Install so that the cylinder's contact surface will be parallel to the pallet's contact surface to prevent rotational torque from being applied on the cylinder rod.
.: Screw Connection M3 X 0.5, Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)], Sealant: None, Release Button: None, Made to Order: Body Color: Black; Release Button Color: Orange
.: Screw Connection M3 X 0.5, Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)], Sealant: None, Release Button: Oval Type, Made to Order: -
.: Screw Connection M3 X 0.5, Thread Material/Surface Treatment: G [SUS303 (Male Thread/Screw Connection, Only M3)], Sealant: None, Release Button: Oval Type, Made to Order: -
screw: Female thread M3 × 0.5, Type: With buffer, Vacuum outlet direction: Vertical direction, Barbed fitting tube diameter(ø): -
: Male thread M3 × 0.5, Type: With adapter, Vacuum outlet direction: Vertical direction, Barbed fitting tube diameter(ø): -
connection screw: Female thread M3 × 0.5, Type: With buffer, Vacuum outlet direction: Vertical direction, Barbed fitting tube diameter(ø): -