PF2A

Rc NPT G M12 3 m lead wire with connector Without lead wire Symbol N Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Port size Applicable model Flow rate (l/min) Symbol Symbol Output specification 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710/750 PF2A711/721 PF2A751 67 PNP open collector 2 outputs

Ionizer IZN10 Series

Ionizer IZN10 Series RoHS How to Order 01 P IZN10 06 High frequency AC nozzle type Without maintenance detector X194 Made to Order Nozzle type Type Energy saving static neutralization nozzle Symbol Refer to page 449. 01 High flow rate nozzle 02 Bracket Female threads for piping Note) Rc1/8 11 Without bracket Nil Note) Nozzle shape: When using the female thread for the piping, connect the

Nozzle Type Ionizer IZN10E Series ®

Nil None B1 L-bracket IZN10-B1 B2 Pivoting bracket IZN10-B2 B3 DIN rail mounting bracket IZN10-B3 Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping*1 *1 Refer to the cautions when using the female threads for piping shown below. * Refer to page 12. Brackets are the same as those for the current model (IZN10).

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15 to 40% ethylene glycol aqueous solution: Diluted with clean water, without any additives such as antiseptics. (Refer to "Operation at low ambient temperature or low circulating uid temperature" (page 186-1) for the concentration of the ethylene glycol aqueous solution.)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

Thermo-chiller

Accessories Weight10 [kg] 45 1 It should have no condensation. 2 If tap water is used, use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994 cooling water system circulating type make-up water). 3 q Ambient temperature: 25C, w Circulating uid temperature: 20C, e Circulating uid rated ow, r Circulating uid: Tap

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

JIS Symbol G Port size Symbol Port size Size 30 1/4 50 $ 60 75 100 02 03 04 $ Bracket Assembly (Accessory) Part No. $ $ $ $ $ 3/8 Part no. Applicable model BM64 BM65 $ $ $ 1/2 IDG30

Cylinder Positioner IP200 Series

Description Note IP200-02 Pilot valve unit Applicable bore size 50 or more 39020-23 Seal kit Ambient temperature: Standard (5 to 60) Applicable stroke 25 to 300 mm or less Sensitivity Note 2) Within 0.5% F.S. Linearity Note 2) Within 2% F.S. Hysteresis Note 2) Within 1% F.S. Repeatability Note 2) Within 1% F.S.

KP

Clean One-touch fittings (for blowing) 04 06 08 10 12 4 6 8 10 12 Thread connection Tubing (rod) connection 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 K Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer M Plug Same dia. tubing Different dia. tubing (plug-in reducer) 4 6 8 10 12

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

KQ2-G

Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

How to Order 90-SV Series Single Valve/Sub-plate Type IP67 Compliant

Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1 2 5 U D Series compatible with secondary batteries Thread type Nil F N T Rc G NPT NPTF 90 Material restriction Series 2 4 90-SV2000 90-SV4000 Port size Type of actuation Port size Without sub-plate Symbol Nil 02 03 04 Applicable series 2 position single (A) 4 (B) 2 90-SV2000 90-SV4000 90-SV4000 1/4 3/8 1/2

Clean Air Filter SFD Series

(Nil) ID Case material Material Resin Aluminum Stainless steel Symbol 0 1 2 Port size Connection size Note IDG Symbol C04 C06 C08 C10 C12 02 N02 F02 4 6 8 10 12 IDK SFD100 only Clean One-touch fittings (KP series) Symbol 1 and 2 are made to order. For details, refer to page 325.

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

VCB F N G Coil type NPT G Grommet / Tape winding W Grommet / Molded VCL Port size VCS Port size Symbol Series 20 p p 30 10 p VCW M5 01 02 p p M5 1/8 (6A) 1/4 (8A) Magnet wire protection: Tape winding Magnet wire protection: Resin Molded Orifice diameter F Faston terminal / Molded Orifice diameter (mm ) Symbol Series 1 2 1 2 3 2 3 4 1 10 1.6 1.6 2.3 20 3.2 2 Magnet wire protection:

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000

to Order Manifold SS5Q SB 3 1 08 D CE compliant Manifold series Nil Q CE compliant 1 SQ1000 SI unit output polarity 1(P), 3(R) port size Nil N Positive common Negative common 1(P), 3(R) port, One-touch fittings for 8 Nil 1(P), 3(R) port, One-touch fittings for 5/16" 00T Valve stations Symbol 1 station Note Stations Option 01 None DIN rail length specified Back pressure check valve Nil 02

VFA1000 / 3000 / 5000 Series 5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 VFA1000 VFA3000 VFA5000 Symbol M5 01 02 03 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only. Not available with the VFA5000. 1498

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).