HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

IZx-OMX0087

Name of Parts . 4-1-1. Controller . 4-1-2. High voltage power supply module . 4-2. Operation modes . 4-3. High voltage power supply module CH number setting . 4-4. Controller setting . 4-4-1. Operation overview . 4-4-2. Channel selection mode . 4-4-3. Frequency set mode . 4-4-4. Offset voltage adjustment mode . 4-4-5. Balance control selection mode . 4-4-6.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Valve Single Unit

C8 C8 1 4 1 4 Rc Rc C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

SMC

Front matter 12 Particle Generation Grade Cylinder Model Particle generation grade by series 222113121110Standard Description 12-/1321-/223 4 2 4 3 MGPL Compact Guide Cylinder 4 2 10-MGF Guide Table 1, 2, 4 Note) 1, 2, 4 Note) 1122MXP Air Slide Table 11221 1 MXPJ6 1322MXQ 3, 4 Note) 3, 4 Note) Air Slide Table 1322MXS 2 CYP Clean Rodless Cylinder 4 3 12-CY1B Magnetically Coupled Rodless Cylinder

•

Y I w l.8 ),8 ).8 U04 4 .8 1.6 OOU U06 6 2.5 7 , " ~u< U08 8 2.5 7 < 2 1 3 3 Ul0 10 12 4 --'~ 7.7 12 (mm) ZP1: 13 4 13 7.7 12 ZP16 1 16 4 13 8.2 ' 12.5 3.5 Part No.

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

REA/REB

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

2-Color Display Digital Flow Switch Series PFM

Port size Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 13 39 17 17 17 15 17 43 G 1/4 G 1/4 21 21 941 Series PFM7/PFM5 Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.

Stability of suction position,

4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

REA/REB

Dimensions: 15 to 40 ta EA FA tb 4-counter bore dia.

1

Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)

DOC1001322

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Operation screen (home screen) . 4-3 4.3 Preparation of the Circulating Fluid Supply to the User's Equipment . 4-5 4.4 Operation Start and Stop . 4-7 4.4.1 Setting of circulating fluid temperature . 4-7 4.4.2 Setting of the pump operation mode . 4-8 4.4.3 Starting the Product

JXCx-OMX0009

absolute encoder installation . 26 4.

CV/MVGQ

2 (n 4) 2 (n 4) 2 (n 4) 2 n = 4, 8, 12, 16 15 + 55 (n 2) 2 100 + 55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2(Different sides, Same side) 100 110 120 20 90 90 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A59W (n 2) 2 20 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 100 + 55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12

Direct Operated

(8A) 0.24 5.8 7.9 3 0.33 2.0 0.50 12 4 0.19 4.6 2.2 3/8 (10A) 0.33 7.9 3 0.50 12 4 Note) Weight of grommet type.