High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLAV16-30-1-2 XLAV25-30-1-2 XLAV40-30-1-2 XLAV50-30-1-2 With XLAV16A-30-1-2 XLAV25A-30-1-2 XLAV40A-30-1-2 XLAV50A-30-1-2 Indicator Valve size 63 80 Without XLAV63-30-1-2 XLAV80-30-1-2 With XLAV63A-30-1-2 XLAV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

HEAVY DUTY STOPPER CYLINDER

8 1/4 1/4 Auto switch Mountable Warning (1) Check the specifications.

30

38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal size

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

MHL2

Auto switch mounting groove (4 locations) (Finger closing port) (Finger closing port) Rc 1/8 Rc 1/8 D(Rack screw) 2-M10 x 1.5 20Width across flats 17 (2 locations) Width across flats 19 (2 locations) (Piston rod and rack screw) 2-M12 x 1.75 Closed E Open F 4-M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 336 450 Note 1) J dimension is at fully closed.

e-Rodless Actuator

Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Low Profile Guide Type

66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4 RB0805X552 CY1F25 CY1F25 +0.012 0 -X Rc 1/8 1 5 7.5 5.5 140 NPT 1/8 G 1/8 5 9.5 depth 5.4 RB1006X552 Note 1

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

LC6D Connector Cable LC6C Power Connector Cable Model LC6-1-C1--X258 Model LC6-1-C2--X252 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17 18 Interface cable 7 9 8 Power cable

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

28 1 2-5 x 22l AW (spring pin) 30 Z 20 7 2-6.9 through 2-11 counter bore depth 6.3 78 1 75 0.2 60 0.2 60 0.2 35 80 6.3 64 3.1 5 M6 x 1 x 18.5l and M6 x 1 (hexagon bolt) (hexagon nut) 2-M6 x 1 (through) 2-M5 x 0.8 Thread depth 7.5 14 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 30 (Z) 15 6 13 8.5 Model S ZZ Z SS CXS25-10

Pressure Sensor for General Fluids

Adapter with throttle Rc1/8 ZS-31-X188 1 pc. Adapter with throttle NPT1/8 ZS-31-X189 1 pc. Definition and terminology Terms Meaning F Abbreviation for full span and full scale; means the maximum fluctuation range of the Pressure switch rated value. For example, when the output voltage is 1 to 5[V], the F.S. will be 5-1 = 4[V]. (Reference: 1%F.S. = 4 0.01 = 0.04[V]) F.S.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

NCM-A

E GB F GA PIN WC CUSHION NEEDLE (HEX 1.5) LB N NN W WA WB WC Y YC ZB ZC ZD 3.74 0.75 5/8-18 0.50 0.60 0.86 90 0.95 0.63 4.02 0.09 1/8 NPT 3.82 0.88 5/8-18 0.62 0.72 0.82 90 1.17 0.63 4.10 0.09 1/8 NPT 4.37 1.25 3/4-16 0.88 0.85 0.98 45 1.50 0.78 4.75 0.09 1/8 NPT 5.62 1.75 1 1/4-12 1.19 1.20 1.45 45 1.91 1.03 6.06 0.12 1/4 NPT 4 Stainless Steel Body Cylinder Series NCM-A Dimensions ZB + STROKE

Air cylinder

Description Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 1 7 Cushion ring B 1 8 Bushing 1 9 Cushion valve 2 10 Tie-rod 4 11 Retaining ring 2 A 12 Spring washer 8 13 Tie-rod nut 8 14 Wear ring 1 15 Cushion seal 2 16 Rod seal 1 17 Piston seal 1 18 Cushion valve seal 2 19 Cylinder tube gasket 2 20 Piston gasket 1 21 Rod end nut 1 22 Magnet (1) 34

LX Series Compact Electric Actuators

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

XMD/XYD Series

Contents Safety Instructions 2 1. Product Specific Precautions 1 4 (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2. Product Specific Precautions 2 6 (Maintenance parts) 3. Specifications 7 4. Construction --8 5. Operation 9 6. Dimensions 10 7. Guaranteed term and guaranteed range 11 8.

PSxx-OMM0002CN

-2.312.31MPa 10.0-111.0kPa -121.0121.0kPa -29No.PS-OMM0002CN-F [F 5] <> [F 5] 1000 100 [F 5] MPa(ISE)kPa(ZSE)barpsi barpsi 23 [F 0] -30No.PS-OMM0002CN-F [F 7] 5R.D. <> [F 7] [F 7] -31No.PS-OMM0002CN-F [F 8] <> [F 8] [F 8] -32No.PS-OMM0002CN-F OUT1 AP1 (OUT1 AP1 1 AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1 AP2) OUT2 P_1H_1(n_1H_1)AP2 (OUT2 AP2 1 ) OUT2 OUT2 OUT1 OUT2

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IS ISG ZSM 785

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8 8.5 102.5 160 34.5 44.5 32 20.5 38 32 Refer to page

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !