VQ4000

Refer to p. 0-33 to 0-36 for Safety Instruction and common precautions. Caution Warning Manual Override Connection of Lead Wire When manual override is used, the connected equipment starts operating. Make sure that there is no danger. Nonlocking style (push style) is available as standard, locking slotted style is optional style.

ZCUK

(mm) 4 66.0 172 264 412 691 Bore size (mm) 0.5 33 86 132 206 346 0.7 46.2 121 185 289 484 0.3 19.8 51.6 79.2 124 207 10 16 20 25 32 6 8 10 12 Lateral mounting (Body throughhole) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Stroke for Mounting Auto Switch

Rotary Actuated Air Gripper

Stainless steel 7 Pin Carbon steel Heat treatment Electroless nickel plated 17 Cover Aluminum alloy 18 Magnet Rare earth magnet 19 Magnet holder Aluminum alloy Hard anodized 8 Pin roller Stainless steel Nitriding 20 Roller Stainless steel Nitriding 9 Pin roller A Stainless steel Nitriding 21 O ring NBR 10 Vane shaft Stainless steel 22 Stopper packing NBR NBR 11 Joint bolt Steel Zinc chrome 14 33

MXU

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Operating Pressure (MPa) Symbol Specifications Min. operating pressure (MPa) 6 0.12 10 0.06 16 CX Bore size (mm) -XB13 Low speed cylinder (5 to 50 mm/s) 0.06 DTheoretical Output (N) -X Operating pressure (MPa) Operating direction Bore size (mm) 0.7 0.5 0.3 2015 11 6 IN 6 20 14 8 OUT Data 46 33

VSA4

Pilot Nil Body side 1 Base side (Without sub-plate) Piping Option 3 position exhaust center Option Port size 0 Sub-plate side ported 1 Sub-plate bottom ported Nil None 02 00 Without sub-plate Rc 4 Without sub-plate (For manifold) PA Non-locking manual override 1 4 Rc 3 8 Rc Option 03 04 1 2 Caution Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-33

I

indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12 13 '14 16 17 19 19 n Lr 3.29 (83.5) 4.37 (1r1) 5.45 (38.5J 6.54 (i66) (1s05) 8.70 (2a) 9.78 (248.5) 10.87 \2761 11.95 {303.5) 13.03 (33

Rodless Cylinder for Vacuum Series CYV ø15, ø32

alloy Hold spacer 10 Electroless nickel plated Aluminum alloy Slide table 11 Electroless nickel plated Electroless nickel plated Aluminum alloy Base 31 Stainless steel Insertion guide plate 12 Electroless nickel plated Aluminum alloy Cylinder tube 32 Stainless steel Round head Phillips screw 13 Electroless nickel plated Aluminum alloy Tube attaching bracket Hexagon socket head cap screw 33

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

Precision Cylinder Series MTS

x 0.5 Effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 M2.5 x 0.45 12 41 + Stroke 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male threads Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part number: MT-S8 Rod end nut part number: NTJ-006A 4 Series MTS Dimensions/12 MTS12 Basic type 35.5 7 4.5 2-cushion needle 33

5 Port Solenoid Valve Series SV

Response time 5 (EA) 1 (P) 3 (EB) Response time ms at 0.5MPa (72.5psi) Type of actuation 3 position pressure center SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 2 position single 11 or less 25 or less 28 or less 40 or less 2 position double 10 or less 17 or less 26 or less 40 or less 3 position 18 or less 29 or less 32 or less 82 or less 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve 15 or less 33

0.4

or less Rubber seal 0.18 0.42 0.65 0.16 0.20 0.70 25 or less 47 or less VQ1000 VQ1400 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.68 20 or less 40 or less Exhaust center 77 VQ1401 33 or less Rubber seal 0.25 0.30 1.0 0.16 0.20 0.70 25 or less 47 or less VQ1500 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.70 20 or less 40 or less Pressure center VQ1501 33 or less Rubber seal 0.18

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B D-A3l D-G39/K39 D-A5l/A6l D-A59W G1/2 (Applicable cable O.D.: 6.8 to 9.6) Hs Auto switch Hs Ht Ht 49 56 34 S M C AUTO SWITCH S M C AUTO SWITCH A 33 B A 36 B D-A3lC D-G39C/K39C Auto switch G1/2 (Applicable cable O.D.: 6.8 to 9.6) Auto switch D-G5l/K59 D-G5lW/K59W D-G5BA D-G59F/G5NT Hw A 49 B Hs Hs Auto switch 36 24.5 56 D-F5l/J59 D-F5NT D-F5lW/J59W D-F5BA/F59F 14 A 33 B Hs Auto switch

Electric Rotary Table

Features 6 Series LER System Construction/General Purpose I/O Provided by customer Electric rotary table PLC Power supply for I/O signal 24 VDC Note) I/O cable Pages 21, 33 Part no.

REA/REB

34 RS H A 60 + Stroke 9.5 9.5 80 + Stroke RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-33 33 Series REAS Dimensions: 15 to 40 ta tb EA ta EA Port cover FB EB FA TT T S + Stroke 2-P FA Hollow shaft for piping Counterbore dia.

High Purity Fluoropolymer

Refer to pages 33 through 36 regarding tubing connection and special tools. 2. Tighten the nut until it touches the end surface of the body, and then tighten it an addition 1/8 turn. As a guide, refer to the proper tightening torques shown below.

Table of Contents

33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35 35 21.9 30.4 15.2 20 47.5 38 38 23.8 38.3 18.5 41.9 55 59 19.4 30.4 12.8 44.4 57 61 21.9 32.9 15.2 35.6 40.6 41.9 46.9 23 19 R 3/8 20.9 46.1 59 63 23.8 34.6 18.5 47.3 61 65 25 35.8 20.9 50.9 100 107 23.8 36.6 18.5 25.4 42.4 47.4 50.6 55.6 28.6 24 R 1/2 52.5 102 109 25 38.2 20.9 Note 1) Reference dimension

90

Otherwise, it may cause switch output malfunction. 33 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rotary Actuator

For applicable auto switch Nil: A right-hand switch and a Refer to page 33 when the model, refer to the table below. left-hand switch are shipped. angle adjuster unit is needed separately.

Digital Flow Switch (Integrated display type)

Input of set values Setting of Setting of P1AH/n1AH P1dH/n1dH P1L/n1L P_1/n_1 P1AL/n1AL P1dL/n1dL P1H/n1H H_1 H1 (Page 33) (Page 33) (Page 35) 4. Selection of display colour SoG/SoR/REd/GRN (Page 36) 5. Completed [F 1] Setting of OUT1 is completed. -31No.PF-OMM0005-N 1.

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1