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Model Gripping force N (Effective value at 0.5 MPa) Note 1) External Internal Open/Close stroke (Diameter) Port size Lubrication Nominal size Weight g Note 2) Action Model Finger opening width (mm) Finger closing width (mm) Stroke (mm) 11221122125 (130) MHR3-10 MDHR3-10 MHR3-15 MDHR3-15 Vacuum suction type 10 7 6.5 16 22 6 M3 x 0.5 Double acting Non-lube 11221122230 (235) 15 13 12 19 27 8

Vespel is a registered trademark of DuPont. 27 Single Stage Regulator for Ultra High Purity Intermediate flow Series SL5400 For UHP gas delivery Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL54 S M FV4 FV4 02 2PW Delivery pressure Code Delivery pressure

A B HS (mm) D-P5DW Auto switch model 40, 50 A B Hs 9 7 4.5 7.5 44 50 Symbol Bore size (mm) 40 50 8 Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection HS Reed switch D-A9 V Solid state switch D-F9 V D-F9 WV A B 12 HS A B 16, 20, 25 HS A B 32, 40, 50 (mm) D-F9 V, D-F9 WV D-A9 V Auto switch model Symbol A B Hs A B Hs 12 16 20 25 32 40 50 17 19 22.5 24.5 27

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) a = 3000 L3 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 172 27

10-32 UNF 12.9 8 25.5 22.2 28.6 25.8 29.4 11.7 28.3 10 17.5 7.8 9.6 25 5/32" ASD230F-U10/32-03 9.3 13 ASS 20.7 7.8 16.5 15 3/16" ASD230F-U10/32-05 10-32 UNF 8 9.6 10 11.7 28.3 25.5 28.6 25.8 25 22.2 35.2 23.3 11.4 13.5 13 1/4" ASD230F-U10/32-07 32.6 12 ASR 30 16.5 14 3/16" ASD330F-N01-05S 39.5 39.6 23.9 11.6 34.6 17 1/4" ASD330F-N01-07S 42.2 25.6 NPT 1/8 13.2 12.7 36.1 31.1 11.8 14.2 32 27

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model ASF 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 10-32 UNF 8 33.8 30.1 29.6 10 11.7 7.8 34.6 25.1 28.8 9.6 3/16" ASD230FM-U10/32-05 35.2 23.3 16.5 14 11.4 1/4" ASD330FM-U10/32-07 32.6 20.7 13.5 15 12 34.6 14 39.6 3/16" ASD330FM-N01-05S 39.5 23.9 16.5 30 11.4 12.7 36.1 32 11.8 10.6 1/4" 27 ASD330FM-N01-07S 42.2 31.1

Min. d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASD230FG-U10/32-01 8.4 12.9 29.4 17.5 5/32" ASD230FG-U10/32-03 9.3 10-32 UNF 25.5 25.8 25 22.2 8 28.3 28.6 7.8 11.7 9.6 10 16.5 35.2 3/16" ASD230FG-U10/32-05 11.4 23.3 13.5 32.6 1/4" ASD230FG-U10/32-07 12 20.7 34.6 16.5 39.6 14 38.5 3/16" ASD330FG-N01-05S 11.6 23.9 31.1 32 27 12.7 17 36.1 10.6 14.2 42.2 1/4" ASD330FG-N01-07S 13.2 25.6 11.8 NPT1/8 33.9

MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 Series MHKL2/Long Stroke Type Note) Width at opening (mm) L2 Width at closing (mm) L1 Effective gripping force per finger (N) Action Opening/Closing stroke (mm) L2L1 Max. operating frequency (c.p.m) Weight (g) Model Bore size (mm) MHKL2-12D 12 External grip: 14 Internal grip : 16 11 9 20 104 Double acting Single acting External grip: 27

Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-18 19 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Model/Specifications Nominal size 15 10 Action Double acting External grip 7 13 Holding force (N) (Effective value) (1) at 0.5 MPa Internal grip 12 6.5 Finger closing width (mm) Finger opening width (mm) Stroke (mm) 19 16 Opening/Closing stroke (Diameter) 27

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to the text for more detailed precautions of every series. Caution qProvide a stop valve before ADM200 to facilitate maintenance and inspection.

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog and refer to p.1.0-1 and 1.0-2 for precautions on every series. Selection Piping Warning Warning Use auto drain under the following conditions. Use drain piping of auto drain under following conditions. Othrwise, it may cause malfunction.

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.4.0-5 to 4.0-7 for more detailed precautions of every series. HAl w Make sure to install this product on horizontal piping.

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series. Selection Warning qThe residual secondary pressure cannot be released by releasing the supply pressure. To release the residual pressure, contact SMC.

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series. AC Piping AV Warning AU qTo connect the IN side, hold the valve guide at its wrench flats (opposite side 10) and tighten it at the recommended torque of 1.5 to 2Nm.

19 22.5 R 1/4 AS320-F02-SD PF1/4 24.3 9.8 30 55.3 22.4 1.2 49.3 AS320-N02-SD NPT1/4 NPT1/4 AS320-03-SD Rc 3/8 19 22.5 R 3/8 AS320-F03-SD PF3/8 24.3 9.8 30 53.7 20.8 1.2 47.7 AS320-N03-SD NPT3/8 NPT3/8 AS420-04-SD Rc 1/2 24 27.5 R 1/2 AS420-F04-SD PF1/2 28.5 12.4 38.5 63.8 26.7 1.2 55.8 AS420-N04-SD NPT1/2 23.8 NPT1/2 Reference dimension for threads after installation SMC Pneumatics, Inc. 27