HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

XLF Series

103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.

XLA Series

103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

XLA- ∗ -F7NJ ∗ - ∗ Series

103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

LEKF-OMZ0035

Max acceleration/deceleration [mm/s2] Positioning repeatability [mm] 0.01 Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw (LEKFS)Ball screw + Belt (LEKFSR/L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor output [W]/size [mm] 100W/40

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

HRX-OM-W060

Table 3.3-1 Power supply cable and earth leakage breaker (Recommended) Earth leakage breaker Terminal Power Recommended Cable Sensitivity block Model supply crimp Specifications Breaker of screw voltage terminal 1 size leakage diameter (A) current (mA) 4 cores x AWG10 (4 cores x 5.5 mm2) HRL100-A-20 3-phase R5.5-5 30 200V AC including (50Hz) ground M5 30 4 cores x 3-phase HRL200-A-20 40 AWG8

XMD/XYD Series

L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38

RB/RBL/RBQ

According to d = 40, E2 is obtained. Weight equivalent to impact object Me (kg) 0.628 1.10 1.26 1.34 2.04 5.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

Compact Cylinder With Solenoid Valve Series CVQ 32, 40, 50, 63 How to Order CVQ B 32 30 M9BW 5 M Port thread type Mounting 32 40 Through-hole, Both ends tapped (Standard) Foot Rod flange Head flange Double clevis M5 x 0.8 B Nil Rc G NPT L F G D 50 63 F N Piping Mounting brackets are included, (but not assembled).

RB/RBL/RBQ

According to d = 40, E2 is obtained. Weight equivalent to impact object Me (kg) 0.628 1.10 1.26 1.34 2.04 5.

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

10

Mounting bolt X T MM L H D B RB08-X331 RB10-X331 RB14-X331 RB20-X331 RB27-X331 15 4.5 drill, 8 counterbore depth 4.4 32 M8 x 1.0 10 20 M4 7.5 5.5 drill, 9.5 counterbore depth 5.4 19 40 M10 x 1.0 12 25 M5 9.5 9 drill, 14 counterbore depth 8.6 25 54 M14 x 1.5 16 34 M8 12.5 11 drill, 17.5 counterbore depth 10.8 38 70 M20 x 1.5 22 44 M10 19 13.5 drill, 20 counterbore depth 13 50 80 M27 x 1.5

Air Catch Sensor Series ISA

(O-ring: 2, Gasket: 1 enclosed) ISA11-0 For NPN output For PNP output ISA15-0 817 Series ISA Dimensions: Centralized Wiring Type (Terminal Block Box Type) Body Manifold With bracket 34 L2 40 34 L1 Deviation level indicator light Terminal block box 75 Deviation level indicator light Terminal block box 90 10 10 40 90 10 10 Rc 1/8 SUP port (94.4) 70 100 DIN rail center (94.4) 70 100 SUP 40 (

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Heater specifications Item XL-25 XL-40 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-1 No. of heater assemblies 1 pc. H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc.

XMA/XYA Series

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

MLGP

Refer to How to Order for the standard model numbers. 1 to 349 20, 25, 32 -X Applicable stroke (mm) 5 to 345 40 to 80 25 to 345 100 20Part no.: MLGPM20-39-F A 1 mm spacer is installed in MLGPM20-40-F . Dimension C is 77 mm.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Side seal None With side seal Nil K Note) Cylinders with side seal are available for 16 to 40. Number of auto switches Bore size 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 2 pcs 1 pc n pcs Nil S n Stroke adjustment unit symbol Refer to Stroke adjustment unit on page 1351. Made to Order Specifications For details, refer to page 1351.

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Multistage Ejector (N)ZL Series

40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100