AP3100

type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Cv 0.7 1.3 1.0 1.0 1.0 Knob Code Maximum operating pressure Ports 2 ports Code Option (AP3150 only) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting. Control type Lock nut option Nil J Hexagon lock nut Round lock nut 0 1 Meter-out Meter-in Plug-in type 609

P

Body size Metric size 06 08 10 12 Inch size 07 09 11 13 3 4 5 6 1/8 1/4 3/8 1/2 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 1/8 1/4 3/8 1/2 01 02 03 04 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS  2  1F-W2D Series

With One-touch fitting Port size 01 1/8 02 1/4 03 3/8 04 1/2 Thread type G G thread 1

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)

BP1000

internals available for corrosion resistance How to Order Port Number q w e r BP10 01 4PL 4 4 S 0 0 Operating pressure Bonnet option pressure 0.5 to 10 psig (0.0034 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 100 psig (0.034 to 0.7 MPa) 15 to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) Code Bonnet Standard Panel installation 3) Code 01 02

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

How to Order E210/310/410 Series Modular Adapter

Modular Adapter How to Order E210/310/410 Series AC-A AF-A AF-A E310 03 U AR-A Size AL-A Piping port size 210 310 410 Size 310 Port size Uni thread AW-A Symbol 410 210 01 02 03 04 1/8 1/4 3/8 1/2 AC-B Thread AF-A Uni thread U AF-A AR -A -B Specifications AL-A Model E210 E310 E410 AW -A -B Port size 3/8 1/4 1/4 1/4 3/8 1/2 1/8 AW Piping I.D. 10 8 8 8 10 12 6 AG Fluid Air Ambient and fluid

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Thermo-chiller Series HRS Compact Type (Except HRS050)

Note 3) If clear water is used, use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industrial Association (JRA GL-02-1994 cooling water system circulating type make-up water).

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

Drain Separator for Vacuum Series AMJ

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil Rc J ZY 03 3/8 Flow: Right Left F G R 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

ACG

ACG20 to 40 AF + ARG + [S] + AL (7) Pressure switch S AF + [S] + ARG ACG20B to 40B ACG20C to 40C AF + AFM + [S] + ARG ACG20 to 40 AF + ARG + AL + [V] Residual pressure relief 3 port valve AW + AL + [V] ACG20A to 40A Port size AF + ARG + [V] V ACG20B to 40B Body size Port size ACG20C to 40C AF + AFM + ARG + [V] Symbol 20 30 40 AW + AFM + [V] ACG20D to 40D 01 02 03 04 1/8 Note 6) When more

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

PA3000/5000

Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N 3 5 Body only With silencer 3/8 standard 1/2 standard For AIR EXH: AN200-02 Port size Material of body wetted areas 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread