/o Station Number), DIN Rail Option: 0 [w/o DIN Rail, (w/Bracket)]

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: S (5VDC), Lead Wire: MN (M Plug Connector w/o Lead Wire), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Model: 20 (1500 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 1 (12~15VDC), Input Signal: 2 (Voltage Style 0~5VDC), Monitor Output: 1 (Analog Output 1~5VDC), Thread: F [G(PF)], Port Size: 2 [1/4 (1000,2000,3000)], Accessory: C (L Bracket), Cable Connector: S (Straight Style 3m), Pressure Display Unit: 5 (kPa)

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: Ø6, Seal Method: S (with Sealant)

Model: 20 (1500 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: IL (I/O-Link), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 3 [3/8 (2000,3000)], Accessory: C (L Bracket), Cable Connector: S (Straight Style 3m)

Stations: 10 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin)

Stations: 5 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 0 (w/o Cable 25 Pin), Option 1: D0 (DIN Rail Mount w/o DIN Rail), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), Common: 0 (+COM), Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 5 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate)

Stations: 7 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate)

Stations: 12 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin)

Stations: 2 Stations, Port Size: C8 (ø8 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: None, Option 4: R (External Pilot), Option 5: S (Built-in Silencer, Direct Exhaust)

Valve Stations: 6 Stations, Port Size: N11 (ø3/8" One-touch Fitting), Thread: T (NPT/NPTF), SI Unit: 0 (w/o SI Unit), End Plate Type: w/o End Plate, SI Unit COM: +COM (or None in the Case of w/o SI Unit), I/O Unit Stations: None, Option: S (Direct Exhaust)

The seven sizes are 10, 20, 30, 50, 70, 100, and 200 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility. Low speed rotary table; Rotation time adjustment range: 1 to 5 (s/90°); Dimensions compatible with the MSQ series; Smooth motion without stick-slip phenomenon

ø12mm) *Compared with the existing model (MSQ20); Adjustable rotation time range is expanded (0.2 to 2.0 s/90 deg.); Can be used at lower speeds compared with existing product