CM2

Dimensions are the same as standard type. 32 11.0 1.27 40 11.8 2.35 For construction, refer to page 6-4-11. Since the dimensions of mounting style is the same as pages 6-4-13 to 6-4-20, refer to those pages. For other specifications, refer to page 6-4-5. For construction, refer to page 6-4-11.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

"Sl module must be orderd separately "11 11 stations Includes 1 station 10 mount Sl unit.

Compact Manifold Regulator Series ARM5

End plate L 11 1 No.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Adjuster for series 11-MXP6 is available for one side only. Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

11 10-0.022 0 12-0.027 0 With air cushion Air cushion type is not available for 21-/22-CJ2.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

CJ2

B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

JXCx-OMY0004

/s 4-7 DWORD Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 8-9 WORD Acceleration 1 to Max ACC of the basic parameter (5, 11, 14) 1mm/s2 10-11 WORD Deceleration 1 to Max DEC of the basic parameter (5, 11, 14) 1mm/s2 12-13 WORD Pushing force (5, 11, 14) 1% (Thrust setting 14-15 WORD Trigger LV (5, 11, 14) 1% value) 16-17 WORD Pushing (5, 11, 14) 1mm/s speed 18-19 WORD

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

IDX-OM-W019

IDX-OM-W019-C PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFB3E-11 -A,S IDFB4E-11 -A,R,T,S,V IDFB6E-11 -A,K,R,T,S,V IDFB8E-11 -A,K,R,T,S,V IDFB11E-11 -A,K,R,T,S,V IDFB15E-11 -K,R,T,S,V This manual is intended to explain the installation and operation of the product.

Plate Cylinder

I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 9 11 13 16 18 22 26 32 3 4 5 6 13 14 17 23 21 24 27 39 CD-MU02 CD-MU03 CD-MU04 CD-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 16 8.5 10 11 16 19.5 24 26 36 9 11 13 16 8.5 10 11 16 11 14 15 20 8 10 10 14 Material: Rolled steel Surface treatment: Nickel plated Material: Rolled steel Surface treatment: Nickel plated Knuckle pin and

Rotary Cylinder Series MRQ Size: 32, 40 1

Refer to pages 11-11-1 when using auto switches. 11-10-17 18 Series MRQ Made to Order Specifications: -X1 to -X5 Please consult with SMC for further information on specifications, dimensions and delivery.

Filter Regulator

Structural Drawing and Replacement Parts 11-12 7. Bowl Assembly Specifications 13-20 8. Assembly of Optional Parts 21-22 9. Operation and Adjustment 23-25 10. Trouble Shooting 26-27 11. How to Replace the Components 28-40 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-31 11-3. Element Replacement 32 11-4. Valve Assembly Replacement 33-35 11-5.

MXQ

Rubber stopper (P. 8-5-40) Metal stopper (P. 8-5-43) Basic style 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 11 5.5 11 Adjuster at extension end N-M5 x 0.8 thread depth 6 36.5 (Adjuster at extension end) 11 5.5 5H9 depth 5 +0.030 0 Retraction end adjuster 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

IDX-OM-W020

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 13 13-1 . 13-1 IDFB Series 2 IDX-OM-W020 i i i 1 () OFF 3 ON OFF i 1 1 3 i-1 IDFB Series i 1 IDX-OM-W020 i i 2 5 i 2 1 i-2 IDFB Series i 2 IDX-OM-W020 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-2-2 IDFB Series i 3 IDX-OM-W020 i i 2 6 WARNING !

IDX-OM-W035

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50 i-2-4 i-2-5 0 i-2 IDFB Series i-3 IDX-OM-W035 i i-2-6 WARNING !

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

11 10-0.022 0 12-0.027 0 With air cushion With air cushion type is not available for 21-/22-CJ2.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82