High Vacuum L Type Valve

terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (T) Grommet (G) Conduit (C) ( G ) ( C ) ( T ) mm Model A B C D E F G J K L M XLS-16-*G 25.5 104 XLS-16-*C 41 113 38 30 35 17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66

11-cqs-e

.: GR-S-010 (10 g) 66

Title not found

(800) 526-7661 1/4 Female Pipe Thread to Tube 23/32 LTees: 1/4 NPT Female to Tube 21/32 9/16 31/32 13/16 29/32 27/32 11/16 9/16 9/16 11/16 Hex Typ. 13/16 13/16 15/16 19/32 Typ. 1 3/32 65 1/4 FLT2 1/4 FLT1 1/4 FLT4 1/4 FLT5 1/4 FLT6 1/4 FLT3 1/4 FLT2 1/2 111/16 Tees: 1/4 NPT Female to Tube 11/8 17/16 15/16 19/32 Typ. 11/16 Hex Typ. 13/4 11/8 13/8 15/16 11/16 Hex not shown 66 1/4 FT2 1/4

Cylinder with Turntable Series MGT

MGZ MGT (mm) Bore size (mm) B C DA FA FB FC G GA GB GC H HA HB J K L MM ML NN NL OA Standard stroke (mm) 63 80 100 10 12 15 78 91.5 15 15 20 103 12 18 25 M10 M12 M14 16 22 25 162 202 240 20 25 30 16.5 14.5 18 49 56.5 66 13.5 15.5 19 39 45.5 55.5 77 96.5 116 16.5 19 23 M6 x 1.0 M8 x 1.25 M10 x 1.5 22 26 32 58 54 62 39 46 56 8.6 10.6 12.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 25, 50, 75, 100, 125,

10

4H9 0 depth 4.5 Auto switch mounting groove (4 locations)1 H M5 x 0.8 (Finger opening port) 4 x M8 x 1.25 (Piston rod and rack screw) M5 x 0.8 (Finger closing port) 76 33.2 11.5 6.5 16 1 30 12 Width across flats 13 23.5 52 (4 locations) 18.5 K (81) 38 29 29 29 12 Closed E 14 14 40 Open F 21 21 64 G 4 x M8 x 1.25 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-25DZ 66

Magnet Gripper

less Lubrication Non-lube Weight 475 g Symbol 1 Magnet Gripper MHM-X6400 Dimensions 4 x 29 Auto switch insert area 4 x M5 x 0.8 Thread depth 7.5 Auto switch mounting groove on workpiece release side 4 x M5 x 0.8 Thread depth 7.5 4 x M5 x 0.8 Thread depth 7.5 Rc1/8 4 x 29 Auto switch insert area 15 15 15 17 (Workpiece adsorption port) 6.4 6.4 58 6.4 74.2 A (Refer to the figure below.) 6.8 66

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

4 x M8 x 1.25 through (Thread for mounting attachment) 717 MHW2 Series Dimensions MHW2-50D Flat finger type (Standard) 40 2 x M10 x 1.5 thread depth 20 (Mounting thread) 36 96 136 4 x M10 x 1.5 thread depth 20 (Mounting thread) Bottom through hole dia. 8.5 (Mounting hole) 69 2 x M10 x 1.5 thread depth 20 (Mounting thread) 48 112 56 70 80 58 17 +0.4 +0.1 4 44 40 52 52H9 +0.074 depth 5 0 66

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Style Air Gripper Rack & Pinion Style Series MHW2 MHW2-50D Flat finger type (Standard) 40 MHZ 2-M10 x 1.5 thread depth 20 (Mounting hole) MHF 36 MHL 96 136 4-M10 x 1.5 thread depth 20 (Mounting thread) 2-M10 x 1.5 thread depth 20 Bottom through hole dia. 8.5 (Mounting hole) 69 MHR (Mounting hole) 48 MHK MHS MHC 112 56 70 80 MHT MHY 58 17 MHW +0.4 +0.1 4 44 MRHQ 40 52 52H9 +0.074 depth 5 0 66

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 2.6 3.3 5.1 6.8 8.6 9 12.5 16.5 20 24.5 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

3

With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-14-4 Series ML1C Mechanically Jointed Rodless Cylinder with Brake Hy-rodless Cylinder Cylinder Specifications 25 32 40 Bore size (mm) Cam follower guide type Guide type Air Fluid Double acting Action 0.1 to 0.8 Operating pressure range (MPa) 1.2 Proof pressure (MPa) 5 to 60C (No freezing) Ambient and fluid temperature

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-14-4 5 Series ML1C Mechanically Jointed Rodless Cylinder with Brake Hy-rodless Cylinder Cylinder Specifications 25 32 40 Bore size (mm) Cam follower guide type Guide type Air Fluid Double acting Action 0.1 to 0.8 Operating pressure range (MPa) 1.2 Proof pressure (MPa) 5 to 60C (No freezing) Ambient and fluid

ML2B

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-13-8 6 Stroke Reading Rodless Cylinder with Brake Series ML2B Cylinder Specifications 25 32 40 Bore size (mm) Fluid Air Double acting Spring and pneumatic 0.1 to 0.8 MPa 0.3 to 0.5 MPa 1.2 MPa 0.75 MPa 5 to 60C (No freezing) 100 to 1500 mm/s (During the positioning 100 to 500 mm/s) Air cushion on both sides

Transfer

4 714 Stroke Reading Rodless Cylinder with Brake ML2B Series Component Parts Material Carbon steel Qty. 1 2 1 6 1 1 8 4 2 1 2 8 2 2 2 No. 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 Description Note Nickel plated Chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Special resin Special resin Aluminum alloy Rolled steel Carbon steel Special resin

Clean Gas Filter

L/min (ANR) SFB20-02 0.1 Inlet pressure Max. flow rate line 0.3 MPa Pressure drop MPa 0.1 MPa 0.01 0.7 MPa 0.5 MPa 0.001 0.0001 1000 10 100 Flow rate L/min (ANR) 304 SFB100/200 Series Clean Gas Filter/Clean Gas Strainer: Cartridge Type/Straight Type Dimensions SFB100/200: Rc 1/4 SFB101/201: NPT 1/4 SFB104: M5 HAA HAW Bracket 2 x M5, Rc 1/4, NPT 1/4 AT IDF IDU 24 40 50 IN IDF FS 2 x 4.5 66

CE

M14 x 1 4-4.5 through 7.5 counter bore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 38 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7 2-M5 x 0.8 (port size) 71.5 103 + Stroke 24 127 + Stroke 2 5 High Precision Scale Cylinder Series CEP1 Foot type 4-4.5 CEP1L12 Stroke 4 (Positioning pin hole) 40 5.5 13 25 6 +0.05 +0.02 66

Copper-free Actuators

long stroke SCQSl 2.2-10 20-CQSW Double rod 2.2-30 20-CQSlS Anti-lateral load Compact cylinder Series CDQS (Note 2, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66

CXT

(NA) (NA) Q+Stroke MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG d Bore (mm) Standard stroke (mm) Slide Ball bushing (N) (NA) PA* PB PW Q A E F G GP H HG HN HP HT L MGC 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 00 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 MGF * PA dimension is the center sorted factor

LX

50 50 3.1 3.1 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.6 1.6 1.1 1.1 0.6 0.6 0.2 0.2 0.1 0.1 200 200 0.9 0.8 0.6 0.6 0.4 0.3 0.2 0.1 0.1 0.1 For transfer load of 1.5kg Positioning time (sec) Positioning distance (mm) 100 150 50 10 1 50 2.1 3.1 1.1 0.3 0.1 Speed (mm/s) 100 1.1 1.6 0.6 0.2 0.1 200 0.6 0.8 0.3 0.1 0.1 Refer to page 302 for acceleration time. 273 66

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 D3 T2 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 34.6 33.9 11.8 39.6 38.9 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 14 15.8 18 19.7 20.3 23.1 32 35 65 68 107 110 212 215 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S