High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Vacuum Unit Ejector / Vacuum Pump System

Noise Level (Reference values) Model ZK207 ZK210 ZK212 ZK215 ZK2G (High-noise reduction silencer exhaust) 46 55 63 69 Noise level [dB(A)] ZK2A (Silencer exhaust) 59 66 75 76 -55No.

FILTER REGULATOR

93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 1/8 44.3 AW60-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions Model Q S T U AW20-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AW40-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AW40-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60-B 70 66

XLG Series

Magnet (option) External seal (maintenance part) Heater (option) Pilot port (Pressurized / Totally closed) Axial seal (material : FKM) Scraper (Material : FKM) Valve (material : SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171 66

High Vacuum L Type Valve

terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (T) Grommet (G) Conduit (C) ( G ) ( C ) ( T ) mm Model A B C D E F G J K L M XLS-16-*G 25.5 104 XLS-16-*C 41 113 38 30 35 17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66

11-cqs-e

.: GR-S-010 (10 g) 66

Title not found

(800) 526-7661 1/4 Female Pipe Thread to Tube 23/32 LTees: 1/4 NPT Female to Tube 21/32 9/16 31/32 13/16 29/32 27/32 11/16 9/16 9/16 11/16 Hex Typ. 13/16 13/16 15/16 19/32 Typ. 1 3/32 65 1/4 FLT2 1/4 FLT1 1/4 FLT4 1/4 FLT5 1/4 FLT6 1/4 FLT3 1/4 FLT2 1/2 111/16 Tees: 1/4 NPT Female to Tube 11/8 17/16 15/16 19/32 Typ. 11/16 Hex Typ. 13/4 11/8 13/8 15/16 11/16 Hex not shown 66 1/4 FT2 1/4

Cylinder with Turntable Series MGT

MGZ MGT (mm) Bore size (mm) B C DA FA FB FC G GA GB GC H HA HB J K L MM ML NN NL OA Standard stroke (mm) 63 80 100 10 12 15 78 91.5 15 15 20 103 12 18 25 M10 M12 M14 16 22 25 162 202 240 20 25 30 16.5 14.5 18 49 56.5 66 13.5 15.5 19 39 45.5 55.5 77 96.5 116 16.5 19 23 M6 x 1.0 M8 x 1.25 M10 x 1.5 22 26 32 58 54 62 39 46 56 8.6 10.6 12.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 25, 50, 75, 100, 125,

10

4H9 0 depth 4.5 Auto switch mounting groove (4 locations)1 H M5 x 0.8 (Finger opening port) 4 x M8 x 1.25 (Piston rod and rack screw) M5 x 0.8 (Finger closing port) 76 33.2 11.5 6.5 16 1 30 12 Width across flats 13 23.5 52 (4 locations) 18.5 K (81) 38 29 29 29 12 Closed E 14 14 40 Open F 21 21 64 G 4 x M8 x 1.25 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-25DZ 66

Magnet Gripper

less Lubrication Non-lube Weight 475 g Symbol 1 Magnet Gripper MHM-X6400 Dimensions 4 x 29 Auto switch insert area 4 x M5 x 0.8 Thread depth 7.5 Auto switch mounting groove on workpiece release side 4 x M5 x 0.8 Thread depth 7.5 4 x M5 x 0.8 Thread depth 7.5 Rc1/8 4 x 29 Auto switch insert area 15 15 15 17 (Workpiece adsorption port) 6.4 6.4 58 6.4 74.2 A (Refer to the figure below.) 6.8 66

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

4 x M8 x 1.25 through (Thread for mounting attachment) 717 MHW2 Series Dimensions MHW2-50D Flat finger type (Standard) 40 2 x M10 x 1.5 thread depth 20 (Mounting thread) 36 96 136 4 x M10 x 1.5 thread depth 20 (Mounting thread) Bottom through hole dia. 8.5 (Mounting hole) 69 2 x M10 x 1.5 thread depth 20 (Mounting thread) 48 112 56 70 80 58 17 +0.4 +0.1 4 44 40 52 52H9 +0.074 depth 5 0 66

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Style Air Gripper Rack & Pinion Style Series MHW2 MHW2-50D Flat finger type (Standard) 40 MHZ 2-M10 x 1.5 thread depth 20 (Mounting hole) MHF 36 MHL 96 136 4-M10 x 1.5 thread depth 20 (Mounting thread) 2-M10 x 1.5 thread depth 20 Bottom through hole dia. 8.5 (Mounting hole) 69 MHR (Mounting hole) 48 MHK MHS MHC 112 56 70 80 MHT MHY 58 17 MHW +0.4 +0.1 4 44 MRHQ 40 52 52H9 +0.074 depth 5 0 66

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 2.6 3.3 5.1 6.8 8.6 9 12.5 16.5 20 24.5 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

3

With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-14-4 Series ML1C Mechanically Jointed Rodless Cylinder with Brake Hy-rodless Cylinder Cylinder Specifications 25 32 40 Bore size (mm) Cam follower guide type Guide type Air Fluid Double acting Action 0.1 to 0.8 Operating pressure range (MPa) 1.2 Proof pressure (MPa) 5 to 60C (No freezing) Ambient and fluid temperature

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-14-4 5 Series ML1C Mechanically Jointed Rodless Cylinder with Brake Hy-rodless Cylinder Cylinder Specifications 25 32 40 Bore size (mm) Cam follower guide type Guide type Air Fluid Double acting Action 0.1 to 0.8 Operating pressure range (MPa) 1.2 Proof pressure (MPa) 5 to 60C (No freezing) Ambient and fluid

ML2B

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-13-8 6 Stroke Reading Rodless Cylinder with Brake Series ML2B Cylinder Specifications 25 32 40 Bore size (mm) Fluid Air Double acting Spring and pneumatic 0.1 to 0.8 MPa 0.3 to 0.5 MPa 1.2 MPa 0.75 MPa 5 to 60C (No freezing) 100 to 1500 mm/s (During the positioning 100 to 500 mm/s) Air cushion on both sides

Transfer

4 714 Stroke Reading Rodless Cylinder with Brake ML2B Series Component Parts Material Carbon steel Qty. 1 2 1 6 1 1 8 4 2 1 2 8 2 2 2 No. 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 Description Note Nickel plated Chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Special resin Special resin Aluminum alloy Rolled steel Carbon steel Special resin

Clean Gas Filter

L/min (ANR) SFB20-02 0.1 Inlet pressure Max. flow rate line 0.3 MPa Pressure drop MPa 0.1 MPa 0.01 0.7 MPa 0.5 MPa 0.001 0.0001 1000 10 100 Flow rate L/min (ANR) 304 SFB100/200 Series Clean Gas Filter/Clean Gas Strainer: Cartridge Type/Straight Type Dimensions SFB100/200: Rc 1/4 SFB101/201: NPT 1/4 SFB104: M5 HAA HAW Bracket 2 x M5, Rc 1/4, NPT 1/4 AT IDF IDU 24 40 50 IN IDF FS 2 x 4.5 66

CE

M14 x 1 4-4.5 through 7.5 counter bore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 38 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7 2-M5 x 0.8 (port size) 71.5 103 + Stroke 24 127 + Stroke 2 5 High Precision Scale Cylinder Series CEP1 Foot type 4-4.5 CEP1L12 Stroke 4 (Positioning pin hole) 40 5.5 13 25 6 +0.05 +0.02 66