Fieldbus System

) L5 L4 L3 Power connector 8 26 47 85.1 90 8 83 4.6 8 54.2 5.5 10.8 29.6 39.9 35 106 B A A B (4.9) 92.6 A A A A A B B B B B Input connector SI Unit Output connector FE terminal (3.2) Connector for Handheld Terminal DIN rail holding screw (For DIN rail mounting) Valve Plate DIN rail holding screw (For DIN rail mounting) Digital Output Unit Digital Input Unit Communication connector 2 x 4.6

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

7

Special electrical entry direction With bracket/Special electrical entry direction VXD2 to VXD2 3 A 6 D VXD2 to VXD2 3 A 6 D VXD2 to VXD2 7 E 9 G 90 Symbol Symbol Standard 180 90 180 90 90 A IN OUT Nil B IN OUT OUT IN IN OUT 180 180 180 180 270 90 270 90 B IN OUT IN OUT A C IN OUT IN OUT 270 270 270 270 1 Available for the VXD23 A to 26 D. 2 Bracket is attached as standard with the resin

HRX-OM-X084

For a facility having a large installation area (that can vent the air naturally): Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

26 1.1 3 1.6 8 38 7.9 0.33 1.0 3 8 (10) 4.5 1.9 10 46 15 0.61 6 0.33 3 7.9 26 1.1 Note) Weight of grommet type.

VM

A variety of actuator types.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

26 45 228 272 290 281 299 Lube Non-lube 120 Up to 998 Lube Non-lube 1801 to 2000 26 26 45 257 272 290 286 304 Dimensions except mentioned above are the same as standard type.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Hs Auto switch 12 15 Reed switches D-B5, D-B6 22.5 B A 33 113 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Proper auto switch mounting positions (mm) D-F5F D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-A59W D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-F5NTL D-B5, D-B64 Auto switch types D-B59W Bore size (mm) A A A B A A A B A B B B B B 40 21 10.5 14 11.5 14.5 17 22 23 11

Stainless Steel One-touch Fittings Series KG

A Weight (g) L1 L2 M D Q Part No.

Modular Design with Uniform Body Style

drain cock C2SL-36-A With bowl guard C2SL-36C-A C3SL-36-A C4SL-36-A Nylon Drain cock with barb fitting With bowl guard C3SL-36W-A C4SL-36W-A Metal Without drain cock C2SL-2-A C3SL-2-A C4SL-2-A With level gauge C3LL-8-A C4LL-8-A With drain cock C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A *1 The bowl assembly comes with a bowl seal.

Series KG Stainless Steel One-touch Fittings

A Weight (g) L1 L2 M D Q Part No.

Table of Contents

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Plug-in Unit

Note) Terminal no.@6 is connected to @5 inside the connector. 2-2-58 Base Mounted Series VQC Plug-in Unit VV5QC41 made by CONINVERS GmbH Circular multiple connectors (26 pins) 3(R) port 2-Rc 3/4 1(P) port 2-Rc 1/2 M27 male screw VQC SMC SMC SMC SMC SMC SMC SMC 20.5 101 95.5 15.7 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 SQ 12 60 43.5 42.7 18 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 21.5 (6.5) Pilot

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

CRBB-OM00004

1 2 Holding block (A) 1 2 1 Switch block (A) 1 1 Switch block (B) 1 1 Holding block (A) 1 No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-G5NTL D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore (mm) A B A A A A A Hs Hs Hs Hs B 16 (23) B B B 18 (26) B 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 20 27.5 27.5 27 24.5 52.5 55.5 54 51 56.5 57.5 21.5