Exhaust Cleaner for Clean Rooms AMP Series

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Digital Flow Switch for Water Series PF3W 3-color display ®

Port size Calibration certificate (Only flow sensor) Symbol Port size Rated flow range None With calibration certificate Nil A 21 $ $ 04 $ 20 $ $ 40 $ $ 11 $ $ 03 04 06 10 12 14 3/8 1/2 3/4 1/1 1 1/4 1 1/2 The certificate is written in both English and Flow adjustment valve Japanese.

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Performance Weight g Recommended flow m3/min(ANR) Effective area mm2 Sonic conductance C [dm3/(sbar)] Model AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 0.4 or less 0.5 5 1 1 10 2 0.8 or less 3 2.5 15 1.0 or less 4 7 35 3.0 or less 60 12 5.0 or less 5.5 90 8.0 or less 18 8.5 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

Soft start up valve with lock out

) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil B A 3(R) DZ 1/2 (AVL4000) 04 G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110

Related Products

) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil 3(R) DZ 1/2 (AVL4000) 04 B A G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110

AS-R/AS-Q

Body size 06 6 07 1/4" 08 8 09 5/16" 10 10 11 3/8" 12 12 13 1/2" 2 1/4 standard 3 3/8 standard 4 1/2 standard With rapid supply and exhaust function For selecting applicable tubing O.D., refer to the model on page 9. Metric size and inch size types can be visually identied by the color of the release button.

AS-R/AS-Q

Body size 06 6 07 1/4" 08 8 09 5/16" 10 10 11 3/8" 12 12 13 1/2" 2 1/4 standard 3 3/8 standard 4 1/2 standard With rapid supply and exhaust function For selecting applicable tubing O.D., refer to the model on page 9. Metric size and inch size types can be visually identied by the color of the release button.

Speed Controller: Standard Type Large Flow In-line Type AS Series

04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Speed Controller: Standard Type Large Flow In-line Type AS Series

04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

ZSE5/ISE5

-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

Air Cylinder

GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 13 14 8 29 8 12 2 35 5 26 M4 x 0.7 5 6 14 M8 x 1.25 24 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 33 10 14 2 40 6 31 M5 x 0.8 5.5 8 16 M10 x 1.25 29 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 40 12 18 2 40 6 38 M5 x 0.8 5.5 10 20 M10

Electric Actuator/Slider Type

20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 23 Actuator specications Speed [mm/s] Note 2) 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3,000 Positioning repeatability [mm] 0.02 Lead [mm] 10 5 12 6 16 8 20 10 Impact/Vibration resistance [m/s2] Note 3) 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Air Cylinder NCA1 Series

10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125

NCA1

8 3 1/4 8 7/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7

One-touch Fittings

[mm] Weight [g] X (X) Y Nylon Urethane *1 D D Applicable tubing Oval type Round type 4 1/8 KQ2H04-01GS1 10 10 7.7 10 14.3 11.2 13.3 4.8 3.4 3 5.6 1/4 KQ2H04-02GS1 14 14 7.7 10 16.7 12 13.3 4.8 3.4 3 14.6 8 to 16 4, 6 6 1/8 KQ2H06-01GS1 10 9.9 9.7 12 18.4 15.3 13.3 13.1 10.4 4.5 5.8 1/4 KQ2H06-02GS1 14 14 9.7 12 16.7 12 13.3 13.1 10.4 4.5 12.5 3/8 KQ2H06-03GS1 17 17 9.7 12 18.1 13 13.3 13.1

Table of Contents

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

4 600 LEFS32lll-550l 745 556 680 10 4 600 LEFS32lll-600l 795 606 730 10 4 600 LEFS32lll-650l 845 656 780 12 5 750 LEFS32lll-700l 895 706 830 12 5 750 LEFS32lll-750l 945 756 880 12 5 750 LEFS32lll-800l 995 806 930 14 6 900 LEFS32lll-850l 1045 856 980 14 6 900 LEFS32lll-900l 1095 906 1030 14 6 900 LEFS32lll-950l 1145 956 1080 16 7 1050 LEFS32lll-1000l 1195 1006 1130 16 7 1050 LC3F2 Note 1)

CL

6 6 8 TD 8 9 9 10 TT 10 10 10 11 TY 32 40 40 53 TX 32 40 40 53 TZ 52 60 60 77 Z 173 187 189 Bore 20 25 32 40 PW S 127 1/8 1/8 1/8 1/4 38 M10 X 1.25 41 41 137 139 167 M10 X 1.25 M14 X 1.5 222.5 41 Integrated Clevis (E) CLM2E Bore size Stroke (mm) A 18 22 22 24 BP BQ BZ 57.5 69 69 76 D 8 10 12 14 GB 8 8 8 11 BC 38 45 45 52 AL 15.5 19.5 19.5 21 CD 8 8 10 10 BN 80 90 90 B1 13 17 17 22 CX 12 12

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14