Fitting Type: T (Union Tee), Size Combination-A Side: 3A (Applicable Tubing Size 3/8" x 1/4"), Different Diameter-B Side: 3B (Applicable Tubing Size 1/4" x 5/32")

Fitting Type: U (Union), Size Combination-A Side: 3A (Applicable Tubing Size 3/8" x 1/4"), Different Diameter-B Side: 3B (Applicable Tubing Size 1/4" x 5/32")

Fitting Type: U (Union), Size Combination-A Side: 3B (Applicable Tubing Size 1/4" x 5/32"), Different Diameter-B Side: 3A (Applicable Tubing Size 3/8" x 1/4")

Fitting Type: P (Panel Mount Union), Size Combination-A Side: 3A (Applicable Tubing Size 3/8" x 1/4"), Different Diameter-B Side: 3B (Applicable Tubing Size 1/4" x 5/32")

Fitting Type: T (Union Tee), Size Combination-A Side: 3B (Applicable Tubing Size 1/4" x 5/32"), Different Diameter-B Side: 3A (Applicable Tubing Size 3/8" x 1/4")

Fitting Type: P (Panel Mount Union), Size Combination-A Side: 3B (Applicable Tubing Size 1/4" x 5/32"), Different Diameter-B Side: 3A (Applicable Tubing Size 3/8" x 1/4")

Fitting Type: T (Union Tee), Size Combination-A Side: 3A (Applicable Tubing Size 3/8" x 1/4"), Different Diameter-B Side: Same Diameter (B Side), Packaging: 1 (Standard Packaging Equivalent to Class M5.5)

Fitting Type: U (Union), Size Combination-A Side: 3A (Applicable Tubing Size 3/8" x 1/4"), Different Diameter-B Side: Same Diameter (B Side), Packaging: 1 (Standard Packaging Equivalent to Class M5.5)

Size Combinations: 3A-ST1 (3/8" x 1/4"; Type 1)

Type: T (Union Tee), Size Combinations: 3A (3/8" x 1/4"), Fitting Type: T1 (Type 1)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

SYJ VQZ300 Port size Symbol VQZ200 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 1 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VK (A) 2 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

CM2

1 !

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

SYA3000/5000/7000

110 2.5 4.3 [2.4] VFA Exhaust center Pressure center 0.23 [0.32] 0.97 [0.61] 2.2 0.39 0.58 P port: Single Double Closed center 100 106 2 position 3.2 0.26 0.77 3.2 0.37 0.82 1 4 C8 VFRA SYA720-C8 0.25 0.24 0.57 0.63 2.6 [1.9] 2.4 0.42 [0.46] 0.31 0.70 [0.56] 0.62 2.6 M5 x 0.8 One-touch ( ) 3 position 116 2.4 3.3 [2.4] Exhaust center Pressure center fitting for 8 EA, EB port : 1 8 VA 0.28

MGG

1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

VQ20/30

VN VQ30 LVC LVA JIS Symbol LVH (A) 2 Characteristic Specifications LVD VQ20 VQ30 Series LVQ 1 (P) C8 C6 C10 C12 N.C.