G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25
50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2
Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.
1.41.6Nm 8 2 VR2110 3 01.0MPa 0.250.8MPa 0.560s (*) 10 (%) F.S. oC( -560 3/ (s C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec
AR40P-270AS AR30P-270AS AR40P-270AS Set nut AR40P-260S AR30P-260S AR40P-260S G46-10-02 Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS
Within 1%F.S. Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.
Note) The above does not appty 1 0 analog output types. Series ZSE48/ISE4DB (mm) Dimensions Standard Type 4 M4X07 20 30 25 5 6 8 5 / dePlh 5.5 I ~i" ~1 I I I .. -# I f-ri: ~ It: ~\I I II 0 '" !~ \'\1 ~/I I~ j 'l OI :A(PT)Y. T1 NPTF Ya PipIng port / I M5XO 8 "eplh 5/ I 8 ~~ With Bracket A I 30 ~ o ~ I I ::1 ';!1 rl .J '1'1..
Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32
R Z Standard specifications AR40 AR40-06 AR50 AR60 1 AR30 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Gauge port size Relief pressure Ambient and fluid temperature Construction Weight (kg) 1 2 1 4 3 8 , 1 4 3 8 , , 4 3 3 4 1 , Air 1.5MPa 1.0MPa 0.05 to 0.85MPa 1 4 1 4 1 8 1 4 1 4 Note 1) Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(
Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)
Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)