NCQ8

-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) P = 20.5 23.5 21.3 16.5 18 11 M3 M12 17.7 11.6 13.5 36.1 83.8 5 37.6 3 3 PWR 3 3 42.7 3 5 PWR 3 5 E 3 5 E E 3 5 4 A E 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 2 2 2 2 60.3 76.8 1 1 1 1 BUS 0 BUS 0 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 0 0 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 M8

NCA1

5/8 2.40 2 1/4 5 1/8 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2.19 19/32 3/8-18 1 1/4 1 3/8 2 5/16 2.13 3 3/4 2.48 2 3/8 5 1/4 325 (3.25") 1 3 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1/4 3/8-24 3/4 0 1/2 5/8 1.57 1.18 2.76 5/8 1/2-13 1 1/2 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0

NCA1

3/4 2.48 2 3/8 5 1/4 325 (3.25") 1 3 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1/4 3/8-24 3/4 0 1/2 5/8 1.57 1.18 2.76 5/8 1/2-13 1 1/2 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

2-8-7 8 Series VQD1000 How to Order Manifold How to Order Valves VQD11 L 5 5 1 M5 Plug lead unit manifold VV4QD1 5 Body type 3 5 Body ported Base mounted Manifold 2 5 Body ported Base mounted Valve option Valve station Standard (2W) Vacuum (2 W) For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(For details, refer to page 359.) 344 5 Port Solenoid Valve 10-SYJ7000 Construction (A)4 2(B) 2(B) (A)4 2 position single 2 position double 1 (P) (R1)5 3(R2) 3(R2) 1 (P) (R1)5 y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 t q r w 3(R2) 1 (P) (R1)5 (A) 4 (B

Battery-less

5 !8@8 e r t !2 !1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.

Air Slide Table

M9NV M9N IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW 2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color

SX

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

indication (2-color indication) 5 V, 12 V Relay, PLC Yes 2-wire 24 V Water resistant (2-color indication) 12 V Grommet IC circuit With diagnostic output (2-color indication) F79F 4-wire (NPN) 5 V, 12 V Magnetic field resistant (2-color indication) P5DW 2-wire Solid state switches marked with are produced upon receipt of order.

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

CQ2

SCQ2 Bore size A, #6 (#6+#9) 2.3-10 Compact Cylinder/Standard: Double Acting Single Rod Series CQ2 Foot (mm) Foot/CQ2L Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 A B L LD Y LG LH LZ X LS LT LX LY L1 35.3 13.5 29.5 17 4.5 4.5 6.6 6.6 4.5 5 5.8 5.8 2.8 2.8 4 4 17 19 24 26 44 48 62 66 8 8 9.2 5 6.5 7.5 7.5 2 2 3.2 3.2 34 38 48 52 24 36.8 13.5 33.5 42 46 18.5 25.5

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 7 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

Made to Order

Note 2) Applicable stroke available in 5 mm increments.

VQ4000

For replacement parts, refer to page 2-5-47. Refer to pages 2-5-40 to 2-5-43 for control unit.

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)