Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve, Release Valve Rated Voltage: 100VAC 50/60HZ

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 2 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Control Unit: Air Release Valve, Blank Plate for Filter Regulator, Release Valve Rated Voltage: 100VAC 50/60HZ

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Control Unit: Air Filter w/Auto Drain, Regulator, Blank Plate for Air Release Valve, Release Valve Rated Voltage: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 8 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Control Unit: Air Filter w/Manual Drain, Regulator, Blank Plate for Air Release Valve, Release Valve Rated Voltage: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 6 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/8, Thread: NPT, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve, Release Valve Rated Voltage: 100VAC 50/60HZ

SFOD-OMT0009CN

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

CEx-OMB0060

Signal Meaning 1 D0 Digit of 10-2 Bit0 19 D12 Digit of 101 Bit0 2 D1 Digit of 10-2 Bit1 20 D13 Digit of 101 Bit1 3 D2 Digit of 10-2 Bit2 21 D14 Digit of 101 Bit2 4 D3 Digit of 10-2 Bit3 22 D15 Digit of 101 Bit3 5 D4 Digit of 10Bit0 23 D16 Digit of 102 Bit0 6 D5 Digit of 10Bit1 24 D17 Digit of 102 Bit1 7 D6 Digit of 10Bit2 25 D18 Digit of 102 Bit2 8 D7 Digit of 10Bit3 26 D19 Digit of 102 Bit3

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123 112.5 91.5 16 135.5 125 102 17 148

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

For details, refer to page 25. 3 Series C(L)KQG32 Basic Specifications C(L)KQG32 Model HIGH type with lock Double acting Action 32 Bore size (mm) 12.5 (Without workpiece)/10 Cylinder stroke/Clamp stroke (mm) Air Fluid CKQ;: 0.15 (0.1) CLKQ;: 22 (0.15) Minimum operating pressure psi (MPa) Maximum operating pressure 102 psi (0.7 MPa) 7.5 to 13.0 Guide pin diameter (mm) 145 psi (1.0 MPa) 13.5

VDW

Note 2) For low vacuum specifications, the operating pressure range is 1 Torr (1.33 x 102 Pa) to 1.0 MPa. Please consult with SMC if using below 1 Torr (1.33 x 102 Pa). PAX PB Flow Characteristics Water Air 12 (INN.C.) Orifice size (mm ) Port size 12 (INN.C.)

Title not found

) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24 (s3) 6.69 (170) 2.O5 (.521 2.da (66) (r78) 1.57 (40) 402 (102

2-Layer Soft Fluoropolymer Tubing

(0.7) 73 (0.5) 102 (0.7) 144 (60) > > > > > > > > > > > > > > > 5 5 > > > > > > > > > 5 > > > > 5 5 5 > 5 > > > > 5 5 5 > > Hydrochloric acid Citric acid 145 (1.0) 131 (0.9) 87 (0.6) 58 (0.4) 87 (0.6) 158 (70) Sulfuric acid Stearic acid Formic acid Nitric acid 131 (0.9) 116 (0.8) 73 (0.5) 58 (0.4) 73 (0.5) 158 (80) 5 5 > 5 > Caustic soda Ethyl acetate Butyl acetate 116 (0.8) 102 (0.7) 58

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123 112.5 91.5 16 135.5 125 102 17 148

2-Layer Soft Fluoropolymer Tubing Series TQ

) 131 (0.9) 87 (0.6) 87 (0.6) 158 (70) 58 (0.4) 131 (0.9) 116 (0.8) 73 (0.5) 73 (0.5) 158 (80) 44 (0.3) 116 (0.8) 102 (0.7) 58 (0.4) 58 (0.4) 194 (90) 87 (0.6) 44 (0.3) 102 (0.7) 58 (0.4) 44 (0.3) 212 (100) Mineral oil ASTM No.3 Naphtha Note 1) Chemically inert means not to cause any chemical reaction.

3 Position Cylinder Series RZQ

39.5 16.5 36.5 21.5 10.5 M10 x 1.5 45 M16 x 2.0 84 21 77 15 103 7 36 28 60 9 14 Rc 1/4 18 4.5 6.5 19 1226 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 32 30 18 6.6 4 107.7 82.5 66.5 Special cap bolt 40 33 92 76 18 6.6 4 117.2 50 39 96.5 73.5 22 9 5 126.7 LY 63 46 102 76 28 11 5 138.2 LH Bore size (mm) LX LY LZ X Y X Y

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 6) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. 26 42 36 52 46 62 56 72 66 82 76 92 86 102 96 112 Note 1) The above dimensions are for ZZQ104-BSB. ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E GK-00. ZQ1 3M-J1 L-F-00. ZQ1 3M-Q1 L-E -00. In case of ZQ1 3M-F -00, the overall length is 87.2.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

FT FX FY FZ G GA GB J K M MA MM NA NB P D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 60 44 18 45 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14 x 1.5 30 22 1/4 17 50 25 9 73 73 53 20 50 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 19 63 28 8 80 80 60 22.4 55 30 11 12 102

Air Cylinder CP Series Cylinder Positioner Assembly

) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24 (s3) 6.69 (170) 2.O5 (.521 2.da (66) (r78) 1.57 (40) 402 (102