Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 2 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 14 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 3 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MANIFOLD, 15-STA, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ, VP3/5/7 BODY PT 1/4, 3.96832 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP300VV3P3-41CommonCommon1/4VP3442 to 20 stationsW

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MANIFOLD, 14-STA, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ, VP3/5/7 BODY PT 1/4, 3.96832 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP300VV3P3-41CommonCommon1/4VP3442 to 20 stationsW

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MANIFOLD, 16-STA, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ, VP3/5/7 BODY PT 1/4, 3.96832 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP300VV3P3-41CommonCommon1/4VP3442 to 20 stationsW

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit). The VP series may be used as either a selector valve, or a divider valve. It is available in a normally closed or a normally open style. The series is vacuum applicable up to 101.2kPa., MANIFOLD, 7-STA, VALVE, VP3/5/7 SOL VALVE 3-PORT,

Type: Relay Device, Type: Rotary type, Connection Port Size: Rc1/4, Input pressure(MPa): 0.02 to 0.06 / 0.06 to 0.1, Pressure(MPa): 1.0, Pilot valve: N/A, Fork lever type fitting: N/A, Lever unit: N/A, Position feedback signal: Available, Ambient temperature(°C): -20 to 80 (standard)

Fluoropolymer Piping Equipment

8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.

CA2

34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P R S P R R port 1/8 R port 1/8 A, B port size Nil Rc A B B A A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 M5 F G M5 x 0.8 A, B port M5 x 0.8, C4 N C4 NPT 4 One-touch fitting T NPTF N3 5/32" One-touch fitting Type 41 (5 port/Base mounted) How to Order 10 SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid pilot valve is on same side as the A, B port.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve Refer to the p.1.2-41.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.

25

IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.