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43 46 16 39 42 44 46 49 51 20 67 70 75 79 83 88 92 97 101 105 25 103 110 116 123 130 137 143 150 157 164 Accuracy End deflection (Y direction)*1 0.02 mm End deflection (X direction)*1 0.02 mm Non-rotating accuracy*1 0.05 *1 The values show the end deflection or play of the product without load in the extended condition.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved 1st printing QT printing QT 8100SZ Printed in Japan. D-DN Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

For details of the COM port checking and setting methods refer to the LATC Configurator Configuration Software Installation Manual". 101 - Check that the LATCA controller, communication cable, USB cable, and PC are connected correctly. For example, communication cannot be established if the connector has been damaged.

B: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -30No. TQ1230001-OM106-B

A: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -31No. TQ1230001-OM105-A

D: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -36No. TQ1230001-OM101-D

Reference 6.3 Outer dimensions [IDF15E1] Unit: mm 603 41 54 300 AIR OUTLET VENTILATION 16 AIR OUTLET THERMOMETER EVAPORATION WITH LAMP SWITCH C1 R AIR INLET RC1 87 DRAIN SEPARATOR 578 VENTILATION VENTILATION [AC200V] TERMINAL BLOCK 396 DRAIN TUBE LENGTH0.8m (O.D.10 43 15 270 13 4x 380 101 258 314 [AC100V] LENGTH1.9m POWER SUPPLY CORD [AC200V] (17) POWER SUPPLY CABLE ENTRY RUBBER GROMMET 6.4

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position

Specifications 41 Specifications 41 Dimensions 42 Output Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 45 Specifications 48 Specifications 48 Dimensions 48 -1No.EX-OMI0032-G Input Unit Summary of Product Parts 49 Mounting and Installation 50 Installation 50 Wiring 52 Specifications 56 Specifications 56 Dimensions 56 Maintenance 57 Troubleshooting 58

SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 5(R) 1 (P) (R)3 5(R) 1 (P) (R)3 3 position pressure center 4(A) (B)2 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 5(R) 1 (P) (R)3 Caution Be sure to read this before handling the products.

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.1MPa 5 to 50C 2.7mm2 (0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

16 16 stations 02 2 stations Specified layout Note 2) w SI Unit * Without SI Unit, the symbol is nil. * Ensure a match with the common specification of the value to be used.

14 03 38 04 12 D I M E N S I O N S S E R I E S (N)ASN H Hexagonal Width Port Size Model D Min Max Across Flats 20.5 23.3 8 M5x0.8 (N)ASN2-M5 10 30 34 14 1/8 (N)ASN2-01 15 34.2 38.2 17 1/4 (N)ASN2-02 20 37 41 21 3/8 (N)ASN2-03 25 49 55 24 1/2 (N)ASN2-04 30 y, South San Francisco, CA 94080-6370 !

Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.