12 M10 x 1.5 22 M10 x 1.5 8.6 14 44 9 20 1/4 16 9 12 21.5 64 47 14 40 11 148 M8 32 32 46 77 16.5 M10 x 1.5 22 M10 x 1.5 8.6 14 49 9 20 1/4 16 14 12 28 78 55 16.5 50 13.5 162 M10 39 39 58 WA R S T U VA VB WB Bore size (mm) X XA XB XC XL YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 33 Over 25 st to 100 st 83 Over 100 st to 200 st 121 Over 200 st
Do not use them for other purposes.
14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow
Do not remove the name plate. 14. Perform periodic inspections and confirm normal operation, otherwise it may be impossible to guarantee safety due to unexpected malfunction or erroneous operation. 4. Do not touch connector terminals or internal circuit elements when current is being supplied.
NO YES Do you have any problem, even if it might run over the target position? (Overrun) NO Do you have any problem, although an error might occur if it is set to be (number of trial again = 0) in order to prevent from doing a trial again when positioning is done at the outside of the range? During the positioning operation, there may be the case it needs to do overruns or trials again.
NO YES Do you have any problem, even if it might run over the target position? (Overrun) NO Do you have any problem, although an error might occur if it is set to be (number of trial again = 0) in order to prevent from doing a trial again when positioning is done at the outside of the range? During the positioning operation, there may be the case it needs to do overruns or trials again.
Do not operate at pressures or temperatures, etc., beyond the range of specifications, as this can cause damage or malfunction. We do not guarantee against any damage if the product is used outside of the specification range. 10.
The cartridge assembly cannot be inserted while the locking knob is in the LOCK position, attempting to do so may cause damage. Do not directly touch the emitters with your finger or tools. This may result in injury.
Do not disassemble the parts that are not explained in this operation manual. This may decrease the performance and life expectancy of these parts. In addition, disassembly may cause danger. Torque values specified in this manual must be followed. Not adhering to these specifications, can result in damage to the product. 14 XL-OMS0001-B 7-2.
Do not twist the valve seal 1.
CAUTION Do not allow air flow that exceeds the rated flow. If the air flow is allowed outlet side the range of the rated flow even momentarily, drainage and lubricant may splash at the outlet side or cause damage to the component. Do not use in a low pressure application (such as a blower).
Do not use valves in atmospheres of corrosive gases, chemicals, salt water, water or steam, or where there is direct contact with same. 2. Do not use in an explosive atmosphere. 3. Do not use in locations subject to vibration or impact. 4. A protective cover, etc. should be used to shield valves from direct sunlight. 5.
CAUTION Do not allow air flow that exceeds the rated flow. If the air flow is allowed outlet side the range of the rated flow even momentarily, drainage and lubricant may splash at the outlet side or cause damage to the component. Do not use in a low pressure application (such as a blower).
Do not grip the piping port on the back side or the handles of the panel. 3. Do not pass over bumps etc. with the casters.
Safety Instructions Warning Do not disassemble, modify (including changing the printed circuit board) or repair. Do not use the components other than the specified components. An injury or failure can result. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result.
Note Do not pressure-weld the connector cover at the edges. Do not pressure-weld the connector cover at the back of the pressure welding block.
Do not use the product in locations where the temperature may change suddenly even if the ambient temperature range is within the specified limits, resulting in condensation. 2. Do not use this product in an enclosed space. This product utilizes a corona discharge phenomenon.
Do not disassemble the product or make any modifications, including additional machining. Doing so may cause human injury and/or an accident. 14.
Do not make any modifications to be product. Do not take the product apart. Piping Caution 1. Before piping Make sure that all debris, cutting oil, dust, etc, are removed from the piping. 2. Wrapping of pipe tape When screwing piping or fittings into ports, ensure that chips from the pipe threads or sealing material do not get inside the piping.
Hexagon nut Stainless steel 13 Cross recessed round head screw Stainless steel 14 Magnet lever 5 No. 3.