LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1, LQ2 2 LQ1 LQ2 Body class Symbol 2 3 4 5 6 LQ1 LQ2 Applicable fitting Body

ASR

71.1 63.6 28 62.9 55.4 24.1 314 332 22 34.4 76.6 12 20.9 Note 1) d indicates the applicable tubing O.D..

IZx-OMR0035

When performing neutralization, do not input the ionizer stop signal.

VQC5000Series

Do not service or attempt to remove product and machinery/equipment until safety is confirmed. 3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed. 3.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

V Reed switch Solid state switch 12 V IC circuit 5 V,12 V Yes Grommet Diagnostic indication (2-color indication) Relay, PLC 24 V 12 V IC circuit 5 V,12 V Water resistant (2-color indication) 12 V 3-wire (NPN equiv.)

RSQ

16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18 10 15 7 24.5 25.5 31.5 28 31 27 17 11 21 15 20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

SI unit for DeviceNet TM

(EX12-SDN1-X26 and EX12-SDN1-X77 do not occupy the input area.)

Lock unit

Chamfer Chamfer (1) For male thread (2) For female thread 30 30 D-2 D-2 D D Fig. 2 Rod end style Do not apply excessive lateral load or external force to the lock unit. They may break the lock unit. Do not use the product in applications where the rod rotates. Do not apply loads with impact, strong vibration or rotational forces while the lock mechanism is activated.

CXWM/CXWL

V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC F7PW J79W F7BA Water resistant

Direct Operated 3 Port Solenoid Valve

When there is a danger of such malfunction, take countermeasures such as using an individual exhaust manifold. 12. Do not disassemble the product or make any modifications, including additional machining. Doing so may cause human injury and/or an accident. 1. Leakage voltage Caution 5.

3 Port Solenoid Valve

So, do not apply a large amount of oil. Operating Environment 1. Do not use in an atmosphere containing corrosive gases, chemicals, sea water, water, water steam, or where there is direct contact with any of these. Air Supply 1. Type of fluids 2. Do not use in an environment where flammable gas or explosive gas exists. Usage may cause a fire or explosion.

EX500-GPR1A.eng

Do not remove any name plate or label. Do not drop, hit or apply an excessive shock to the unit. Follow the specified tightening torque. Do not apply any excessive force to cables by repeated bending, tensioning or placing a heavy object on the cables. Connect wires and cables correctly. Do not perform any wiring work while the power is on.

Electromagnetic Digital Flow Switch

Do not connect black. Power supply/output connection lead wire Cable Specifications Pin no.

Mechanically Jointed Rodless Cylinders

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cable Color List of Each Terminal No. 1 2 4 6 8 10 12 3 5 7 9 11 13 Terminal no. Lead wire color Dot marking 2 3 4 5 6 Pink 7 8 Terminal no.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Do not use the valves in an atmosphere having corrosive gases, chemicals, salt water, water, steam, or where there is direct contact with any of these. 2. Do not use in explosive atmospheres. 3. Do not use in locations subject to vibration or impact. 4. Do not use in locations where radiated heat will be received from nearby heat sources. 5.