Soft Start-up Valve AV2000/3000/4000/5000 1

/Surge voltage suppressor Thread type Rc G NPT Nil F N None With surge voltage suppressor (Grommet type only) Nil S ITV With light/surge voltage suppressor (Not possible with grommet type) IC Z Port size VBA Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 VE G: Grommet Coil rated voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz

Water-cooledThermo-chiller

Nut (M8) x 2 (Accessory to anti-quake bracket) Front side 120 Optional Accessories Series HRW 4-Port Manifold 4-branching the circulating fluid enables 4 temperature controls at the maximum with the 1 unit Thermo-chiller. Order the heat insulator for 4 port manifold (HRW-MA002) separately if necessary. Part no.

IDX-OM-W019

Thread symbol SYMBOL DRAIN TUBE SIZE NONE 10mm UNIT : inch (mm) N 3/8 DRAFT AIR OUTLET B Q E D A SWITH WITH LAMP AIR OUTLET EVAPORATION THERMOMETER AIR INLET F G DRAIN SEPARATOR VENTILATION C VENTILATION VENTILATION TERMINAL BLOCK DRAIN TUBE (O.D.10 LENGTH:0.8m) (820) J K L P N M H 4-13 POWER CABLE WITH PLUG (L=2800) Dimensions (inch [mm]) Model Thread Size A B C D E F G H J K L M N P Q IDFB3E

Series 10-, 21- AF-A Air Filter

1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Plate Cylinder

q y e !

mlu

4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

asilltr

Rubber Bumper 1 1 Return Spring Steel 1 Zinc Chromate 1 0 Spring Guide Aluminum Alloy 1 Chmmate Auto Switch I Magnet 1 7 Bolt Stainless Steel Bore g e7t"" Borc O %" Alloy Sleel 4 Nickel Plating Borc A 11,4" -4" Bushing Oil lmpregnated Bronze 1 Bore g s7,u" -1'^u' Bronze Casting 1 Bore F 1%" -4" 5 Piston Rod Stainless Steel 1 Urcge/16"-11/16' Carbon Steel 1 B,orc A 1%" -4" 4 Piston Aluminum

Air Cylinder NCQ7 Series Compact Cylinder

Rubber Bumper 1 1 Return Spring Steel 1 Zinc Chromate 1 0 Spring Guide Aluminum Alloy 1 Chmmate Auto Switch I Magnet 1 7 Bolt Stainless Steel Bore g e7t"" Borc O %" Alloy Sleel 4 Nickel Plating Borc A 11,4" -4" Bushing Oil lmpregnated Bronze 1 Bore g s7,u" -1'^u' Bronze Casting 1 Bore F 1%" -4" 5 Piston Rod Stainless Steel 1 Urcge/16"-11/16' Carbon Steel 1 B,orc A 1%" -4" 4 Piston Aluminum

VFR2000-OMM0001

D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

Clean Air Module

Note 2) Refer to the specifications of display unit for the flow rate value per pulse. 340 Clean Air Module LLB Series Dimensions LLB3-1-PRVSF V2 49.5 HAA HAW Mounting hole for 4 x M4 AT 45 37 35 IDF IDU 1.5 4 20.5 278.5 50 IDF FS A Valve open and locked position Rc 1/4 (NPT 1/4) Rc 1/4 (NPT 1/4) IDFA 90 (Lever operating direction) Max. 91 IDFB A Hand valve Valve closed position 5.5 39 IDH

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

Drain Separator for Vacuum Series AMJ 1

ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 158 (160) 2.3 53 8 6.5 23 40 41 16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note

Low Maintenance Filter Series FN1

135 180 4-11 225 (266) (60) AIR VENT G 1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

ChemicalThermo-con

Signal contents 1 2 3 4 5 Pin No.

Drain Separator for Vacuum Series AMJ

Discharge Q B ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (

CLQ

U Q P Front cylinder port P Rear cylinder port H effective thread depth C F V I D M E 22 11 Z T Minimum lead wire bending radius 10 Auto switch D-A7, A8 Dust cover (manual unlocking unit) 4-OA counter bore N 4-OB counter bore BP unlocking port (unlocks when pressurized) K Flat washer 4 pcs.

NCRBIBwserbs

A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.