Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.
Sizes 10 to 25: MHZ 2 Sizes 32 & 40: MHZ 2 .,rr,"""^ J Number of fingers Action Bas c iype End boss side porled' End boss arialonelouch ftlin91 " End boss axal M5 porlr j S nsle-acling on y Throug F a t 'D S actori, basic and N type nnges only " basrcancr N lype iingers onry ' [ , l t o 2 c o n p " l b l p o l 0 l o o 2 5 n r b o r F n / ' o J I I a o a a a a a a a a a a a a a a a a a a a
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket), CE Compliance: Q (CE Marked)
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket), CE Compliance: Q (CE Marked)
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket), CE Compliance: Q (CE Marked)
Control unit type (see pages 13 and 14 for details) Control equipment Symbol A AP M MP F G C E Nil Air filter with auto drain Air filter with manual drain Regulator Air release valve Pressure switch Blank plate (air release valve) Blank plate (filter, regulator) Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Manifold Specifications Piping specifications Ports 2
Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication
specification.2-2 2.3 Terminal block explanation.2-2 2.4 Setting and checking.2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal.2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal .2-19 Chapter 3 Serial communication. 3-1 3.1 Precautions wiring communication .3-1 3.2 Communication
(31)[F 2]OUT2(39) 32 (28) -27No.PF-OMO0004CN-E [] 2 [F 0] 2 F0 F1 F99 2 [rEF] [Anr] [F 0][rEF] 29 [Uni] 1 [ L] L/min [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [F 1][oU1] [P_1] OUT1 [100] 100 L/min 31 [H_1] OUT1 [ 10] 10 L/min [CoL] OUT1 [SoG] ONOFF 2 [HYS] [oU2] OUT2 2 [2_P] [2ot] OUT2 [F 2][oU2] 39 2 [100] 100 L/min [P_2] OUT2 2 [ 10] 10 L/min [H_2] OUT2 [F 3][rES] [rES] [1. 00] 1
Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03
VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.
1 4 3 8 KGD10-02 KGD10-03 39.5 40.5 43 43.5 39 19 10 40 21 18.5 26.5 40.8 12.8 29.0 1 2 KGD10-04 44 45 62 55 56 22 1 4 3 8 KGD12-02 KGD12-03 46.5 47 42 43 12 22 57.2 22 20.9 28.5 45.2 13.9 1 2 KGD12-04 46 48.5 63 127 Stainless Steel One-touch Fittings Series KG Delta: KGD Effective orifice(mm 2) Applicable tube O.D.
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.
(PT-NPTconversion fitting is included) Fig. 2-1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.