44

O.D. 1/8" (3.18) 0.086" (2.18) KFG2H0122-00 7 1.1 8 21.8 5 1.5 8 2 x Applicable tubing H1 H2 H2 0.098" (2.5) 5/32" (4) KFG2H0325-00 7 1.6 8 21.8 5 1.8 8 d 1/4" (6.35) 5/32" (3.95) KFG2H0704-00 16 6 12 25.2 6 3.3 12 5/16" (8) 0.236" (6) M L M KFG2H0906-00 25 17 14 28.6 6.6 5.3 14 3/8" (9.53) 1/4" (6.35) KFG2H1163-00 45 19 17 33.6 7.6 5.6 17 1/2" (12.7) 3/8" (9.53) KFG2H1395-00 55 51 19 37

CXT

1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5

Precision Cylinder Series MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

1 !1 !2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0017 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Heavy Duty Stopper Cylinder Series RSH/RS1H

7 o !6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

Sensor Monitor

Display resolution Output mode OUT1 OUT2 Hysteresis mode 1/10 of P_1 (n_1) 1/10 of P_2 (n_2) Window comparator mode 1/4 of P1H P1L (n1H n1L) 1/4 of P2H P2L (n2H n2L) Error output 1/7 of rated maximum pressure rated minimum pressure Switch output off -51No.PS-OMW0014-B During an error output or when the switch output setting is OFF, the pressure value meter at the atmospheric pressure

VP4

VZS G 1/2 VFS VS4 VQ7 EVS VFN 5-1 1/4, 1 1/2 Conduit terminal: VP4170T12 14 DIN terminal: VP4170D12 14 G 1/2 Applicable cable O.D. 6 to 12 G 1/2 3-6-7 8 Series VP450/470 Dimensions: VP4270 Bottom ported Grommet: VP4270G12 14 (Mounting hole) Manual override (5-1 1/4, 1 1/2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

With Factory Installed

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0003 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

PSxx-OMU0008CN

[F10 ] -45No.PS-OMU0008CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2 OUT2 ( ) OUT2() ( ) OUT2() OUT2 OUT1 OUT2 OFF -46No.PS-OMU0008CN-D RAnG -101.0 kPa 100 kPa 1 MPa 2 MPa Md1Md2 / 3 (3 ) [-] -47No.PS-OMU0008CN-D ON ON () ON () / (o ) P_1(n_1)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -48No.PS-OMU0008CN-D () [F82] OFF -49No.PS-OMU0008CN-D [F11

Compact Vacuum Unit Ejector/ Vacuum Pump System

digit Hysteresis mode Hysteresis Adjustable (can be set from 0) Note 1) Window comparator mode Display type 3 1/2 digits, 7-segment LED 1-color display (red) Display accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 Celcius) Indication LED Lights up when ON OUT1: Green, OUT2: Red.

Refrigerated Air Dryer

60 2 to 25 30 32 35 40 45 1.1 1.1 1.30 1.41 1.06 1 1 1.25 1.16 1.21 1.02 AMF 0.91 0.97 1 1 1 1 0.83 0.89 0.83 0.8 0.92 0.99 ZFC 0.79 0.77 0.7 0.64 0.75 0.98 0.6 0.48 0.63 0.92 SF 0.53 SFD Data C: Inlet Air Pressure Data D: Air Flow Capacity LLB Inlet air pressure (MPa) Inlet air pressure (MPa) Air flow capacity (m3/h [ANR]) Correction factor Correction factor Model IDFA3E IDFA4E 24 IDFA3E

Compact Cylinder with Solenoid Valve/

40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4 7.5 M6 x 1 32 29.7 8 50 6.6 M8 x 1.25 50 0.2 46 10 to 100 77 74 59.6 7.5 M6 x 1 38.5 35.4 8 60 9 M10 x 1.5 54 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will be the same

AMF

8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series AMF Dimensions AMF450 to AMF850 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

7 @5 #6 #3 #2 !9 #4 #5 #1 MY CY @7 @8 t @9 @4 @4 @4 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMetal stopper Shock absorber e !8 A -X i !1 !0 @6 o @0 20Data !3 !4 !5 !6 !2 @2 @1 Detail drawing of part A Component Parts Note Note Material Material No.

PF-OMM0004_C

335 g 530 g 860 g 1075 g 310 g 360 g 610 g + 385 g 435 g 730 g +85 g 171 3mPas(3 cP) 20.5 s 3F.S. 374 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 590(7s 690(7s 7,AC250V G ()JIS B0202(ISO228-1) ISO1179-1(G )ISO16030(G )JIS B0202(ISO228-1) ISO11791(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030(G )()ISO16030 () 0100 1 / -10110 1 2 3F.S. 7 s 2 5F.S. 1090 2 -67No.PF-OMM0004

Lightweight and Compact

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.