Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

CYP

12-CY1R Features 2 Clean Room Rodless Cylinder Series CYP How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

CYPSeries

12-CY1R 3 Series CYP Clean Room Rodless Cylinder How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

CYPSeries

12-CY1R 3 Series CYP Clean Room Rodless Cylinder How to Order CYP 15 Z73 200 Number of auto switches Clean room rodless cylinder 2 pcs. 1 pc.

IDX-OM-W095

. 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

Serial Network

0.2MPa 0.1MPa Model Maximum supply pressure Maximum output pressure Power supply Voltage Current consumption Input signal Output signal Linearity Repeatability Sensitivity Temperature characteristics Ambient and fluid temperature 0.1MPa 0.9MPa 0.5MPa 24VDC 10% Maximum 120mA Note 1) Input signal indicated by 12 bits (resolution 4096) Note 2) Output signal retransmitted by 12 bits (resolution

33

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 Thermo-chiller Q x t: Heat capacity [kJ] 15 x 860 1120 [W] 20C Water bath Cooling capacity = Considering a safety factor

VQ4000

) 24.6 38 48 4 2 B A VS7 24.6 A B 38 48 14 12 5 3 1 A B 30 45 14 3 5 1 12 25.6 Mounting hole Manual override 25.6 Mounting hole 30 45 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc1/8 External pilot port Rc1/8 PE port 19.5 (21) 19.5 (21) 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port Rc1

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

Ionizer Nozzle type IZN10 Series IZS

8 6.5 Section A-A Air blow port Air blow port 2 x M3 x 0.5 thread depth 10 26 32 12 11 2 x 3.4 6/For elbow 1/4"/For elbow 1/4" 11.5 12 24.5 22 7 18.5 16 10 10.3 Refer to page 457 for dimensions of the model with bracket. 463 IZN10 Series Specific Product Precautions 1 Be sure to read this before handling the products.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB 4 5 WA WB 2 2.5 XA XB 4 5 YC

ZSE40/ISE40

24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) 16-2-18 5 Series ZSE40/ISE40 High Precision, Digital Pressure Switch Description 3 1/2-digit LED kPa Displays present pressure.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

0 NBR Detent assembly AXT335-12-3 AXT335-12-3 AXT335-12-3 !1 NBR Gasket AXT333-14 AXT333-14 AXT333-14 !2 NBR Gasket AXT333-15 AXT333-15 AXT333-15 !3 NBR Gasket AXT334-7 !4 NBR Gasket ( ): For DC !5 Solenoid Capsule Assembly (With rubber plug) Specifications Part no.

VND

8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

PSE100

DC PSE 9 LED (Red) OUT2 1 2 3 4 5 6 ZSE4 ISE4 IN2 4 to 20mA IN1 1 to 5V PNP output circuit diagram ZSE5 ISE5 6 9 8 7 10 7 ZSE6 ISE6 OUT1 8 OUT1 OUT2 12 to 24 V DC AUTO SHIFT GND (COM) LED (Green) + 12 to 24V DC OUT2 9 ZSE3 ISE3 LED (Red) 6 GS Input circuit diagram (Autoshift, channel selection) PS 7 Sensor connection 300 ISA + 12 to 24V DC 5 CH.SELECT 1.8k Voltage input type Current

ML1

30 6.8 6.6 12 16 M6 X 1 M8 X 1.25 116.5 14 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 X 1.25 M10 X 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 4.7-8 Hy-Rodless Cylinder SeriesML1 Stroke

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

PSxx-OMU0005CN

-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-