Sine Cylinder Series REC LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm)
LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm)
A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle
LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm)
A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1
1 17 13 16 15 20 10 22 22 11 11 12, 16 4 14 6 9 21 2 20, 25 Over 50 stroke 50 stroke or less MGQM32 to 100 18 17 2 22 13 3 16 1 7 5 15 10 11 23 8 20 11 21 4 14 6 9 Over 50 stroke Component Parts Description Material Note Retaining ring Retaining ring Bumper A Bumper B Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No.
X6 11-7-32 to 11-7-51 Shaft, Bolt, Parallel key stainless spec.
AV 10.5 54 8.5 50 54 70 2.3 35.5 42.5 21 7 8.5 10.5 54 56 50 70 2.3 37 42.5 21 7 AF800 AF900 13 65.8 11 70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length when the filter regulator knob is unlocked.
Note 7) Note 7) Note 7) AW Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.
I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03
O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03
0.7 thread depth 7 65 1 [1] Motor cable mounting direction: R (Entry on the right side) Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) Manual override screw M4 x 0.7 thread depth 7 [Stroke end] 15 30 21 20 59.7 10 Note 5) Mounting surface L2 L1 4.5 Stroke 10 Motor cable mounting direction: L (Entry on the left side) 10 Note 5) 12 4.5 (10) 10.5 Motor cable mounting
Communication . 7-1 7.1 Preparation for Communication . 7-1 7.2 Specifications of communication method. 7-2 7.3 Communication format . 7-3 7.3.1 Control code used for communication . 7-3 7.3.2 Command code list . 7-3 7.3.3 Communication procedures and format . 7-4 7.3.4 Calculation of Check Sum . 7-6 7.4 Details of Communication Format . 7-7 7.4.1 Setting of target temp.
U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5
CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279
Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months. 7-4 7.3 Operation Stop for an Extended Period of Time . 7-5 7.3.1 Discharge of the circulating fluid . 7-5 7.4 Replacement of consumables . 7-8 7.4.1 Replacing Particle
Note 7) Each value is a guide. Use such value to select a motor capacity.