EXxx-OMY0004

See Section 6 Valve Manifold.

HRX-OM-O021

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

Compact Cylinder with Lock Series CLQ

27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

High Power Cylinder Series RHC

51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6

Mechanically Jointed Rodless Cylinders

6 o !1 !

Guide Cylinder/Compact Type Series MGC

5 @6 #1#2 #3 !8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !0 $5 A View A-A' A' Ball bushing bearing Front mounting flange type B B' @6 @0 !8 $3 y !

Low-Speed Rotary Actuator

Table 5 (mm) Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 Bolt 40 28.5 M 8 Rotating range examples Fig.5 Fig.6 shows piping ports of the rotary actuator. Table 6 shows the port size. Table 6 Size Port size 10 M50.8 15 20 B Port A Port Rc 1/8 , G 1/8 NPT 1/8 , NPTF 1/8 30 40 Fig.6 Port location Rotary actuator ports have a fixed orifice.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled. Contact SMC when replacing component parts.

%silltr

l 13.8 27 .6 dla. mm 8,10 12,16 20 25 32 40 50 63 80 100 125 140 160 0.6 0.8 1 I 1.3 1.2 1.6 2 2.7 3.7 4.4 5 6.8 8.1 10.8 12.6 16.8 20.4 27.2 3.4 c.c 8.5 13.5 21 2.4 4.3 6.8 10.5 1 7 27 2.2 3.4 5.4 8.4 13.6 21 .6 2.6 4 A E 10.2 16.2 za.z Equlvalent Flow Sectlon in mmZ Table 7.31 Eguiyalent Section S in mm2 for the valve and the tubing, lor 6 bar working pressure and a pressure drop ol 1 bar

SMC Basic Pneumatics

l 13.8 27 .6 dla. mm 8,10 12,16 20 25 32 40 50 63 80 100 125 140 160 0.6 0.8 1 I 1.3 1.2 1.6 2 2.7 3.7 4.4 5 6.8 8.1 10.8 12.6 16.8 20.4 27.2 3.4 c.c 8.5 13.5 21 2.4 4.3 6.8 10.5 1 7 27 2.2 3.4 5.4 8.4 13.6 21 .6 2.6 4 A E 10.2 16.2 za.z Equlvalent Flow Sectlon in mmZ Table 7.31 Eguiyalent Section S in mm2 for the valve and the tubing, lor 6 bar working pressure and a pressure drop ol 1 bar

Manifold Specifications

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)

Manifold Specifications

Series VZ5000 Type 21 Manifold VV5Z5-21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313

HRX-OM-Z002

HRLE Series 3.3Installation Procedure 3-21 HRX-OM-Z002 Chapter 3 Transport and Set Up Terminal resistance 5 5 5 6 7 6 7 6 7 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance 120 Controller This product This product This product 32nd device first device second device Do not connect any wire to other PIN numbers.

Compact Rotary Actuator Series CRQ2

6 !7 @7 @6 t y e @4 !0 !2 @0 !1 @2 u @5 q @1 !9 !8 !4 !3 Component Parts Component Parts Description Material Description Material No. No.

Filter Regulator

Note 4) -10- 6.

Shock Absorbers and Rate Controls

N/A 6. +0. 6. +0.t3/0 6.02 38.1 6.0 8.3 5.9 t0.0 861 .S !

4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

CEx-OMB0060

Counter operation 21 7-3-1. Handling data range 21 7-3-2. Reset and hold input 21 7-3-3. Correspondence of banks and bank terminals at switching 21 7-3-4. Correspondence of preset numbers and output terminals 21 7-3-5. Output 22 7-3-6. Preset output forms list 23 7-3-7. Output timing chart 24 7-4. Memory (E2ROM) 26 Chapter 8: RS-232C Communication Functions 8-1.

Plate Cylinder

50 6 63 6 15 1 15 2 Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed.

KP/KPQ/KPG

7 8 9 12 13 19 20 21 24 4 18 20.7 10.4 7.5 7.5 D1 10 6 19.5 22.8 12.8 11 11 D1 14 8 21.5 26.3 15.2 21 12 21 D2 M 45 52 45 57 H 10 24 29.4 18.5 17 17 Connection threads 12 57 57 25 31.4 20.9 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.