Pilot Operated

310 550 740 1200 15 690 1 2 3 4 Thread 0.02 20 25 35 40 50 1170 1690 5400 6800 8400 0.7 1.5 Flange 0.03 Note) Weight of grommet type.

Brake mechanism added

12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 85 90 95 D-M9 D-M9W (n 2) 2 15 80 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 90 + 40 (n 4) 2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 60 65 70 D-M9V D-M9WV (n 2) 2 10 55 55 + 30

Air Cylinder Series MB

(mm) Stroke range Z ZZ CDH10 CX +0.3 +0.1 CZ CDH10 L RR U 32 40 50 63 80 100 14 14 20 20 30 30 10 10 14 14 22 22 28 28 40 40 60 60 125 50 28 30 25 32 267 295 64 to 500 to 500 to 600 to 600 to 800 to 800 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 154 158 182 182 228 228 164.5 169 197 197 251 251 U CX to 1000 L CZ Z + Stroke RR Without air cushion Center trunnion Model without

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure Gripping force (N) Gripping force (N) Pressure 0.6 MPa 15 15 0.6 MPa 0.5 MPa External grip 0.5 MPa 10 10 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 5 5 0.2 MPa 0.2 MPa 0 10 20 30 40 50 0 10 20 30 40 50 L L Gripping point L (mm) Gripping point L (mm) MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 Pressure 0.6 MPa Internal grip 30 30 Pressure 0.6 MPa 0.5 MPa Gripping

HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030

RSQ

RZQ Lever type (3) Energy absorbing Adjustable deformation MI W S Cylinder stroke (mm) 12 16 20 32 40, 50 10 10, 15 10, 15, 20 10, 15, 20 20, 25, 30 Double acting Double acting with spring loaded Single acting (Spring extend) CEP1 Note 3) The lever types are applicable only to bore sizes 32, 40 and 50.

Table of Contents

AW10 to 40 AW10 to 40 AW30/40 AW20 AW30/40 AW10 to 40 AW10 to 40 AW30/40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z VEX Body size (5) 10 20 30 40 AMR Thread type ITV Metric thread (M5) Rc NPT G Nil (6) N (1) IC F (2) Note 1) Drain guide is NPT 1/4 (applicable to AW30 and 40), and the exhaust port for autodrain comes with 3/8" Onetouch fitting (applicable to AW30 and AW40).

CLS

Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 B E FA GA L A AL BA BB BC BD BE BG BZ BV BW BP CDH10 C CX CT D EA F GB GC H J K KA M BY 0.1 0.3 +0.084 0 32 36 40 50 50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

(Refer to pages 15-6-3 to 15-6-5 for details.)

Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

Cylinder with Lock Series CLS

D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 105 110 115 15 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 15 + 40 (n2) 2 n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 10 90 95 100 D-Y69 D-Y7PV D-Y7WV 90 + 30 (n4) 2 95 + 30 (n4) 2 100 + 30 (n4) 2 10 + 30 (n2) 2 n pcs.

XL

50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100 mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0

Refrigerated Thermo-chiller

Up to 15 kW cooling capacity achieved. 16 15 Fluorinated fluids: Flourinert FC-3283, FC-40 14 HRZ008-L GALDEN HT135, HT200 Aqueous solution of 60% ethylene glycol Deionized water / Clear water 12 Cooling capacity (kW) 10 8 Regarding the fluid other than the above, please contact SMC. Flourinert is a trademark of 3M.

Water-cooledThermo-chiller

15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Guide Cylinder Series MGG

size (mm) 20 25 32 40 50 Bore size (mm) S O P T U V W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 1/8 26 12 82 48 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 M6 x 1 depth 9 1/8 31 13 100 57 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 M6 x 1 depth 13 1/8 38 16 114 65 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 M6 x 1 depth 13 1/8 47 20 138 84 62 56 238 41 12(15) 109(118) 13

Electric Actuator

S6 100 40 3000 below for details.

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30