Speed Controller with One-touch Fittings Series AS In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

AK1000

volume Mass 1) Max 300 psig (2.1 MPa) for PTFE seat. 2) 14 to 194F (10 to 90C) for Vespel and PEEK seat.

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

DOC1013639

Insertion force [N] (reference value) Working pressure [MPa] Insertion depth [mm] AKP-*-*01 AKP-*-*02 0.1 5.1 6.6 0.3 7.5 11.3 0.5 10.0 16.0 0.7 12.4 20.8 2.4 (12) After operating the residual pressure exhaust button, confirm that the button has returned to the normal position.

VQZ Series

Air temperature() -20 -10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 8 No.VQZ100V-OMK0002-B VQZ Series/ / / /Specific Product Precautions 1 Be sure to read this before handling How to Use Plug Connector Manual Override 1.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Refer to pages 16-143 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. C (COM) A (N.O.) Color of lead wire Black Symbol Contact C Common B (N.C.) A White Normally Open B Red Normally Closed Mounting & Wiring ZSE ISE IFW50--01 to 04/11 to 14/21 to 24 Caution PSE 1.

Digital Flow Switch (Remote type monitor unit)

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMJ0018-F

DOC1003077

The pump might be broken as well. 14 Nm). Integral time Communication parameter Sets control mode.

AW20-B to AW60-B

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

JXCx-OMU0024

Drive is ON when SVRE is OFF (01-098) C Input RESET DRIVE is turned ON before the return to origin position is completed. Drive is ON when SETON is OFF (099) Modify the setting so that these operations will be requested after the C Input return to origin position is completed.

,

-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01

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-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

-01/1-02 Dimensions EVS1-01-FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

HRX-OM-M091

(Request)[STX] 01WSV100258 [ETX] [5Ch] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message SV1 Circulating fluid set temperature [06h] BCC value 00258 Write information (25.8 oC) [5Ch] BCC value 5.8 Command explanation HRS Series 5-18 HRX-OM-M091 Chapter

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, SS5YJ7 BODY PORT 1/8 PT, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, 0.5732 lb

base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available, SS5YJ7 BODY PORT 1/8 PT, VALVE, SS5YJ7 MANIFOLD SYJ7000 5/PORT, DJ, SS5YJ7 BODY PORT 1/8 PT, 0.5732 lb