Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

5 Port Solenoid Valve, Series VQC

C8 C10 C12 02 03 B CM With 8 One-touch fitting With 10 One-touch fitting With 12 One-touch fitting Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed Note 1) Numbers inside ( ) indicate the maximum number of solenoids for mixed single and double wiring. The maximum number of stations is determined by the total number of solenoids. In the case of mixed wiring, use the option symbol "-K."

AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

AS-FG

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 D3 T2 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 34.6 33.9 11.8 39.6 38.9 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 14 15.8 18 19.7 20.3 23.1 32 35 65 68 107 110 212 215 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Valve stations: 2 to 20 , One-touch fittings available, MFLD, VZ5*40 W/FITTING 8M *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, WJ, VV4/5Z* BUILT IN FITTING >1/4, 1.20151 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Valve stations: 2 to 20 , One-touch fittings available, MFLD VZ5*40 SERIES *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, PJ, VV4/5Z* BASE MT 1/4, 1.94282 lb

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Universal type Port size in the cylinder side 6 8 12 10 4 (1) AS22 1FE-01 AS23 1FE-01 R 1/8 AS22 1FE-02 AS23 1FE-02 R 1/4 AS32 1FE-03 AS33 1FE-03 R 3/8 AS42 1FE-04 AS43 1FE-04 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

PFxx-OMK0003CN

PF-OMK0003CN-E PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F N2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) 2 2 2 () 00.5 01 03 -0.50.5 -11 -33 1 L/min L/min L/min L/min L/min L/min 2F.S. 3 2F.S.(1535 ) (25) 5F.S.(050 ) 2F.S.(0300 kPa) 5F.S.(-700 kPa) (0kPa 4) -70300 kPa -100400 kPa 500 kPa 5 15 V 5 ms 1 k DC1224 V10(p-p) 10() 16 mA IP40 050 () 050 -1060 () 3585R.H

Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS3000-021/481012.381012.332, 40, 50, 63130

Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS3000-033/881012.381012.332, 40, 50, 63124

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, HIGH TEMP, AIRLINE EQUIPMENT, AS FLOW CONTROL, DB, AS 1/4INCH STANDARD (PT), .30119 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)

Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: 42 (A Port Side Ported; 42S: Solenoids on the Same Side of A Port), Stations: 03, Port Size: 01 (Rc 1/8), Thread: N (NPT)

Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: 42 (A Port Side Ported; 42S: Solenoids on the Same Side of A Port), Stations: 03, Port Size: 01 (Rc 1/8), Thread: T (NPTF)