LEC-OM032xx

ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12 1 1 0 0 42 - 12. Precautions for controlling the controller (LEC) 12. 1 Communication delay between the gateway unit unit and the controller(LEC) There is communication delay between the gateway unit and the controller (LEC).

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Vacuum Equipment

17 16 19 24 24 40 50 63 80 100 125 27 36 45 56 71 91 29 39 46 57 69 92 32 42 49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

IIIIIII

{kq) 4.41(2\ P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.06 (1 .5) T.T. ln(mm) 0.12 (8) '7s PS|G (5 2Npr th DIMENSIONS Model# A B c o E F G H J K NVM 120t130 1.73 (44) 1.00 '25.411.28 32.5) 1 0 c o.22 (5.5) 0.30 (7.5) 0.67 (17) 0.57 14.s) 1.06 (27) (4) ). t 1 (25) NVM 121t131 1.73 (44\ 1.00 25 4l 1 . 1 2 tn 5t ).9 (2s) 0.22 (5.5) 0 . 1 4 (3.s) 1.67 (17) o.57 14.51 1.06 Q7l ).1 t (4) Millimeters

Air Pilot Operated

:lar r'll TO ORDER FON FIELD REPLACEMENT Kit Numtbr Comprising of SPA OlOO itxt a3l-17 (^S-s"tzo1 TT I I t l l l E H 1 #AXT 392 Speed Control Btock. 1 *AXT 335-12'2 Gasket. 2 #NXT 333-17 Hotd Down Botrs (#8.32 x 1 7t [ux] 'dJmfo rO OFDEA AS PAFT OF VAIVE'}IANIFOLD ASS'Y ADD Sutlix "M" to part numbr.

Silencer Series AN

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

PSxx-OMM0002CN

No.PS-OMM0002CN-F / / ZSE80(F) ISE80(H) 2 9 10 11 14 14 16 17 19 19 21 21 21 F0 23 F1 OUT1 24 F2 OUT2 27 F3 27 F4 / 28 F5 30 F7 31 F8 32 F9 34 F10 35 F98 36 F99 38 39 42 42 43 50 50 52 -1No.PS-OMM0002CN-F (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

PSxx-OMR0001CN

No.PS-OMR0001CN-J // ISA3 1 2 7 8 14 15 2 (ISA3) 15 () 16 (2 ) 16 17 20 26 26 29 34 38 3 41 42 44 44 44 45 45 4 46 46 46 () 58 59 60 5 61 62 62 -1No.PS-OMR0001CN-J 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Mechanical Valves Series NVM, NVFM, NVZNI

{kq) 4.41(2\ P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.06 (1 .5) T.T. ln(mm) 0.12 (8) '7s PS|G (5 2Npr th DIMENSIONS Model# A B c o E F G H J K NVM 120t130 1.73 (44) 1.00 '25.411.28 32.5) 1 0 c o.22 (5.5) 0.30 (7.5) 0.67 (17) 0.57 14.s) 1.06 (27) (4) ). t 1 (25) NVM 121t131 1.73 (44\ 1.00 25 4l 1 . 1 2 tn 5t ).9 (2s) 0.22 (5.5) 0 . 1 4 (3.s) 1.67 (17) o.57 14.51 1.06 Q7l ).1 t (4) Millimeters

Air Pilot Operated Series NVSA

:lar r'll TO ORDER FON FIELD REPLACEMENT Kit Numtbr Comprising of SPA OlOO itxt a3l-17 (^S-s"tzo1 TT I I t l l l E H 1 #AXT 392 Speed Control Btock. 1 *AXT 335-12'2 Gasket. 2 #NXT 333-17 Hotd Down Botrs (#8.32 x 1 7t [ux] 'dJmfo rO OFDEA AS PAFT OF VAIVE'}IANIFOLD ASS'Y ADD Sutlix "M" to part numbr.

Environment

LEFB/Belt Drive Horizontal 4 Work load: W [kg] LEFB25 2 LEFB16 0 0 500 1000 1500 2000 Speed: V [mm/s] 42 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.

20

Material Applicable blow gun model Model Male thread nozzle 1 to 2.5 Male thread nozzle 3 to 4 Width across flats 17 Nozzle type P5670129-01 P5670129-01F P5670129-02 P5670129-02F HNBR Fluororubber HNBR Fluororubber VMG1--01 to 04 VMG1--05 to 07 25 VMG1--1 to 04 Width across flats 17 23.5 VMG1--05 to 07 Cover for copper extension nozzle [mm] Nozzle cover part no.

Auto Switch Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ General Purpose Type P. 7-9-10 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type P. 7-9-15 Band, Rail, Tie-rod Mounting MU D-X 20Data P. 7-9-16 Solid State Switches General Purpose Type P. 7-9-17 Band, Rail, Tie-rod, Direct Mounting

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

Digital Pressure Switch

If the security code is forgotten 42 Troubleshooting 43 Specification 50 Specifications 50 Dimensions 52 -1No.PS-OMM0003-J Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Description Material Note No. 1 2 3 4 5 6 7 8 9 Description Material Note 20, 25: Resin Body Aluminum alloy Hard anodized MHY 10 Cap 32 to 50: Aluminum alloy Piston Hard anodized Aluminum alloy Hard anodized 11 12 13 14 15 16 17 Piston bolt Stainless steel Pinion gear Carbon steel Heat treated MHW MHW Ball bearing Carbon steel Seal cover Schield type Brass Key Carbon steel Bumper Urethane

ML2B

Reed switch D-X 20Data 10-13-17

MHL2

17 4-M6 X 1 through (Thread for mounting attachment) A B C D E F G H 54 96 116 J 120 195 235 Model MHL2-20D MHL2-20D1 MHL2-20D2 32 68 88 160 260 300 122 222 262 82 142 162 38 80 100 71 113 133 58 100 120 Notes) J dimension is at fully closed.