VDW

M5 LVC 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 1 (IN) port 2 (OUT) port LVA 15 LVH 2-M2.5 x 0.45 2-M3 x 0.5 thread depth 5 LVD Thread depth 3.5 VDW31 LVQ 36 (27.6) LQ 300 Lead wire LVN 40 30 SMC SMC 1 1 TI/ TIL AC type Rectifying device PA 4-5 25 PAX 34 28 PB Bracket assembly part no.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Loosen the hexagon nut 41 of right cover 34 to remove the seal washer 40 and hexagon nut with the hexagon socket set screw 37 from the angle adjustment collar 39 . 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 39 45 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (20). Table (20) Parts where grease is to be applied 2.

Short Stroke Electric Actuator Series LX

(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.

SYJA300

3.5 21 25 X 21 14 R P 12 26 40 4 (3.6) (26) 54.2 40.5 48.8 (34) 54.5 54.3 1/8 (P, A, R port) 14.5 16 0.8 R P 18 1.8 (Breathing hole) 1.8 (Breathing hole) 20 12 23 15 1/8,1/4 (P , R port) 48 1797

3 Port Air Operated Valve Series SYJA300 1

) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A SOL.B SOL.A SOL.B (+) () () (+) 15 15 Oki Electric Cable Co,.

Electric Actuator / Slider Type 《 AC Servo Motor 》

LEFB 32 55 61 3.9 40 79 85 5.3 1.

E-P HYREG

IRV 1 to 4 V 67 k 6 0 to 7.5 V 10 k 7 4 to 16 mA 120 8 0 to 15 mA 12 V VEX SRH Body size Port size Rc Option Mounting Symbol Symbol Port 1(P), 2(A) Port 3(R) B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Applicable pilot valve (4) SRP D 00 Without sub-plate M5 M5 SRF B 00 Without sub-plate M5 M5 01 18 ITV 2 00 Without sub-plate 01 18 02 14 Base mounted IC VY1D0-X39 (5) 00 Without

3

35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33 15.2 M6 70.5 92 2.3 39 6.5 10.5 43 46 VXS26 1 42 95 49.5 111.5 40 20 24.5 66 37 17.2 M6 70.5 92 2.3 41 6.5 10.5 45 48 13.5 Electrical entry Grommet DIN terminal Conduit terminal Conduit Q R Q R S Q R S T Q R VXS23 1/4, 3/8 29.5 66 67

JXCx-OMT0001CN

(1) . 40 (2) . 41 7.

Series SYJA300 3 Port Air Operated Valve

M3 X 0.5 SYJA314-M5 N.C. 39 (Without sub-plate 18) Base mounted (With sub-plate) M5 X 0.8 1.8 (0.1) SYJA324-M5 N.O.

High Vacuum L Type Valve

108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05 MPa 0.7 MPa Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Stroke adjustable range Size Suction flow rate L/min (ANR) 6 10 15 20/25 32 2 5

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ22(R)-G-C4/C6/M5 C4, C6, M5 C4: One-touch fitting for 4 2-3.5 mounting hole C6: One-touch fitting for 6 70 300 (Lead wire length) M5: M5 thread 22.5 29.5 19.3 R2.7 27 34 V100 A 11 15 SMC 2 8 Cover dia.1.6 Cross section 0.34 mm2 Manual override 3.5 20.5 SY 34 M3 x 0.5 External pilot port (Only external pilot

VZS

VV5ZS2 C6 06 51G 1 VFN Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Plug-in type Stacking type manifold base with attachment plug lead wire NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2 stations C6 Embedded type One-touch fitting Applicable tubing O.D.: 6 15 stations 15 Symbol Max. 15 stations.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

KG 72309-0114-70-15, etc.

E-MY2_E_D

Front view Mounting holes on the top Bottom view T slots on the bottom T slots on the bottom Mounting holes on the top Model Nominal of actuator Thread size Model Nominal of actuator Thread size Effective length 16 M3 16 M3 4 to 5mm E-MY2C E-MY2H E-MY2C E-MY2H 25 M5 25 M5 6 to 8mm 16 M5 16 M4 6 to 7mm E-MY2HT E-MY2HT 25 M8 25 M6 8 to 10mm If T slots on the bottom is used for installation,

PFxx-OMX0002

A to B C to D 3,000 L 30 to 3000 30 to 3150 40 to 4000 40 to 4200 L/min 6,000 L 60 to 6000 60 to 6300 40 to 4000 40 to 4200 12,000 L 120 to 12000 120 to 12600 40 to 4000 40 to 4200 PF3A7#H 3,000 L 1.1 to 105.9 1.1 to 111.2 40 to 4000 40 to 4200 cfm 6,000 L 2.2 to 211.9 2.2 to 222.4 40 to 4000 40 to 4200 12,000 L 4.0 to 424.0 4.0 to 445.0 40 to 4000 40 to 4200 : The flow ranges and relationship

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.